This review surveys micromachined gyroscope structure and circuitry technology. The
principle of micromachined gyroscopes is first introduced. Then, different kinds of MEMS …

A comprehensive review of the modeling approaches used to simulate the behaviors of
micro/nano-gyroscopes is presented. The performance and sensitivity of these inertial …

Small devices in remote or difficult-to-reach areas can benefit from harvesting energy from
mechanical wasted energy, which reduces the requirement for a new power source. A multi …

This paper presents microfabrication process-driven design of a multi-degree of freedom
(multi-DoF) non-resonant electrostatic microelectromechanical systems (MEMS) gyroscope …

In this paper, we study the dynamics, transfer of energy and control of the vibrations of micro-
electromechanical system (MEMS) gyroscope with linear and nonlinear parametric …

This paper presents the design and analysis of a multi degree of freedom (DOF) electro-
thermally actuated non-resonant MEMS gyroscope with a 3-DOF drive mode and 1-DOF …

A novel method is investigated in this paper to estimate the temperature's influence upon the
resonant frequency (RESF) and quality factor (Q) of a vacuum packaged Micro-Electro …

This paper presents a novel design for a high resolution microelectromechanical systems
(MEMS) technology based resonant gyroscope using the mode-localization effect in weekly …

The dynamic equations of a four-degree-of-freedom micro gyroscope system were
developed considering the nonlinearity of driving stiffness, the primary resonance, and the 1 …

In this study, we investigate a novel metallic microgripper which is able to grasp and
transport nano particles (nano tubes/wires) and release them on desirable substrate by …