Virtual metrology (VM) involves estimating a product's quality directly from production
process data without physically measuring it. This enables the product quality of each unit of …

Big data analytics is the journey to turn data into insights for more informed business and
operational decisions. As the chemical engineering community is collecting more data …

Dataset size continues to increase and data are being collected from numerous
applications. Because collecting labeled data is expensive and time consuming, the amount …

Abstract Advanced Process Control (APC) has become an increasingly pressing issue for
the semiconductor industry, particularly in the new era of sub-5nm process technology. To …

Virtual metrology (VM) has been successfully applied to semiconductor manufacturing as an
efficient way of achieving wafer-to-wafer quality control. VM involves the estimation of …

In the context of Industry 4.0, many production scenarios utilise sensors to monitor
manufacturing processes, resulting in massive data that can be leveraged to build machine …

The ultimate objective of “Zero-Defect Manufacturing,” as a new growth step of Industry 4.0,
is to significantly increase product yield and eventually accomplish zero-defect. For product …

Manufacturing semiconductor wafers involves many sequential processes, and each
process has various equipment-related variables or factors, which results in high …

Methods and systems for measuring process induced errors in a multiple patterning
semiconductor fabrication process based on measurements of a specimen and process …

The purpose of variable selection techniques is to select a subset of relevant variables for a
particular learning algorithm in order to improve the accuracy of prediction model and …