A multi-step plasma etching technique is developed to obtain deep-grooved micro-scale ball- bearing raceways and employed in the fabrication of multiple ball-bearing supported …
KY Özkaya, Mİ Beyaz - Sensors and Actuators A: Physical, 2015 - Elsevier
Electromagnetic design optimization of axial-flux rotary micromachines utilizing double-layer permanent magnets is presented and applied to a micro-scale generator/spirometer …
MI Beyaz, B Hanrahan, J Feldman… - IEEE Sensors …, 2013 - ieeexplore.ieee.org
This paper presents the theory and implementation of an integrated sensing technique for the real-time measurement of applied actuation conditions in a micro-turbo-generator. The …
This dissertation explores the fundamental tribology of microfabricated rolling bearings for future micro-machines. It is hypothesized that adhesion, rather than elastic hysteresis …
MI Beyaz, B Hanrahan, J Feldman… - SENSORS, 2012 …, 2012 - ieeexplore.ieee.org
This paper reports the in-situ sensing of multiple mechanical parameters of an integrated rotary electromagnetic micro-turbo-generator using output electrical signals. The device is …
Measurement of breathing parameters is necessary for a variety of applications ranging from respiration monitoring to breathing-related diseases. In this respect, spirometry is one of the …