This paper presents the design, fabrication, and testing of an integrated microturbogenerator
utilizing permanent magnets and microball bearings. The key components of this generator …

A multi-step plasma etching technique is developed to obtain deep-grooved micro-scale ball-
bearing raceways and employed in the fabrication of multiple ball-bearing supported …

Electromagnetic design optimization of axial-flux rotary micromachines utilizing double-layer
permanent magnets is presented and applied to a micro-scale generator/spirometer …

This paper presents the theory and implementation of an integrated sensing technique for
the real-time measurement of applied actuation conditions in a micro-turbo-generator. The …

This dissertation explores the fundamental tribology of microfabricated rolling bearings for
future micro-machines. It is hypothesized that adhesion, rather than elastic hysteresis …

This paper reports the in-situ sensing of multiple mechanical parameters of an integrated
rotary electromagnetic micro-turbo-generator using output electrical signals. The device is …

Measurement of breathing parameters is necessary for a variety of applications ranging from
respiration monitoring to breathing-related diseases. In this respect, spirometry is one of the …