Tunable laser interference lithography preparation of plasmonic nanoparticle arrays tailored for SERS

NG Quilis, M Lequeux, P Venugopalan, I Khan, W Knoll… - Nanoscale, 2018 - pubs.rsc.org
The facile preparation of arrays of plasmonic nanoparticles over a square centimeter surface
area is reported. The developed method relies on tailored laser interference lithography …

Development of controlled nanosphere lithography technology

AA Osipov, AE Gagaeva, AB Speshilova… - Scientific Reports, 2023 - nature.com
This work is devoted to the development of nanosphere lithography (NSL) technology, which
is a low-cost and efficient method to form nanostructures for nanoelectronics, as well as …

Label-free biosensing using hybrid plasmonic substrates generated via nanosphere lithography

E Lulek, AE Cetin, YN Ertas - ACS Applied Nano Materials, 2024 - ACS Publications
The rapid advancement of air/water interface coatings transcends multiple domains. These
coatings, valued for expansive coverage, facile acquisition, and economic efficiency, hold …

Plasmonics with metallic nanowires

J Niedziółka-Jönsson, S Mackowski - Materials, 2019 - mdpi.com
The purpose of this review is to introduce and present the concept of metallic nanowires as
building-blocks of plasmonically active structures. In addition to concise description of both …

Photolithography reaches 6 nm half-pitch using EUV light

D Fan, Y Ekinci - Extreme Ultraviolet (EUV) Lithography VII, 2016 - spiedigitallibrary.org
EUV interference lithography records the interference pattern of two diffracted, coherent light
beams, where the pattern resolution is half the diffraction grating resolution. The fabrication …

Photolithography reaches 6 nm half-pitch using extreme ultraviolet light

D Fan, Y Ekinci - Journal of Micro/Nanolithography, MEMS …, 2016 - spiedigitallibrary.org
Extreme ultraviolet interference lithography records the interference pattern of two diffracted,
coherent light beams, where the pattern resolution is half the diffraction grating resolution …

Coupled, simultaneous displacement and dealloying reactions into Fe–Ni–Co nanowires for thinning nanowire segments

X Geng, EJ Podlaha - Nano Letters, 2016 - ACS Publications
A new methodology is reported to shape template-assisted electrodeposition of Fe-rich, Fe–
Ni–Co nanowires to have a thin nanowire segment using a coupled displacement reaction …

Directional emission of plastic luminescent films using photonic crystals fabricated by soft-X-ray interference lithography and reactive ion etching

Q Wu, B Liu, Z Zhu, M Gu, H Chen, C Xue, J Zhao… - Scientific Reports, 2018 - nature.com
In this report, a novel method to prepare photonic crystals based on the combination of soft-
X-ray interference lithography (XIL) and reactive ion etching (RIE) with a bi-layer photoresist …

Image inverting, topography and feature size manipulation using organic/inorganic bi-layer lift-off for nanoimprint template

S Si, M Hoffmann - Microelectronic Engineering, 2018 - Elsevier
A fast and cost efficient approach to fabricate multiple NIL templates with inverse image
tone, modified topography and tunable feature sizes is presented. The nanopatterns from …

Applications of Hydrogen Silsesquioxane in Nanomanufacturing and Nanofabrication

Y Xu, Y Xin, T Shirai - 名古屋工業大学先進セラミックス研究 …, 2023 - nitech.repo.nii.ac.jp
Hydrogen silsesquioxane (HSQ) is a versatile inorganic material that has garnered
significant attention in the semiconductor industry, such as in micro-/nano-electromechanical …