Inductor with non-uniform lamination thicknesses

P Herget - US Patent 9,047,890, 2015 - Google Patents
A thin film inductor having yokes, one or more of which is laminated, and one or more
conductors passing between the yokes. The laminated yoke or yokes help reduce eddy …

Magnetic inductor with multiple magnetic layer thicknesses

H Deligianni, BB Doris, EJ O'sullivan… - US Patent 10,593,450, 2020 - Google Patents
Embodiments are directed to a method of forming a lami nated magnetic inductor and
resulting structures having multiple magnetic layer thicknesses. A first magnetic stack having …

Method of fabricating a magnetic stack arrangement of a laminated magnetic inductor

H Deligianni, BB Doris, EJ O'sullivan… - US Patent 10,597,769, 2020 - Google Patents
Embodiments are directed to a method of forming a mag netic stack arrangement of a
laminated magnetic inductor having a high frequency peak quality factor (Q). A first magnetic …

Magnetic inductor with multiple magnetic layer thicknesses

H Deligianni, BB Doris, EJ O'sullivan… - US Patent 10,593,449, 2020 - Google Patents
Embodiments are directed to a method of forming a lami nated magnetic inductor and
resulting structures having multiple magnetic layer thicknesses. A first magnetic stack having …

Method of fabricating a laminated stack of magnetic inductor

H Deligianni, BB Doris, EJ O'sullivan… - US Patent 10,607,759, 2020 - Google Patents
Embodiments are directed to a method of forming a lami nated magnetic inductor and
resulting structures having anisotropic magnetic layers. A first magnetic stack is formed …

Forming a ferromagnetic alloy core for high frequency micro fabricated inductors and transformers

PJ Hopper, W French, A Papou, DW Lee - US Patent 8,450,830, 2013 - Google Patents
A plurality of sequential electro-deposition, planarization and insulator deposition steps are
performed over a patterned thick photoresist film to form a laminated ferromagnetic alloy …

Method of manufacturing inductor with ferromagnetic cores

K Cheng, J Li, G Wang, Q Zhang - US Patent 10,553,354, 2020 - Google Patents
US10553354B2 - Method of manufacturing inductor with ferromagnetic cores - Google
Patents US10553354B2 - Method of manufacturing inductor with ferromagnetic cores …

Stress management scheme for fabricating thick magnetic films of an inductor yoke arrangement

H Deligianni, BB Doris, EJ O'sullivan… - US Patent 11,170,933, 2021 - Google Patents
Embodiments of the invention are directed to a method of fabricating a yoke arrangement of
an inductor. A non-limiting example method includes forming a dielectric layer across from a …

Integrated circuit comprising multi-layer micromechanical structures with improved mass and reliability by using modified vias and method for forming the same

PJ Michalik, DF MARTÍNEZ, JM Boadas - US Patent 10,065,855, 2018 - Google Patents
An integrated circuit and the method to produce the integrated circuit comprising: a substrate
(10); active devices (11); plurality of metal layers (17), wherein said metal layers are …

Manufacturing method for inductor with ferromagnetic cores

K Cheng, J Li, G Wang, Q Zhang - US Patent 11,037,725, 2021 - Google Patents
A method of making an inductor includes forming a plurality of first metal layers on a
substrate and an ILD. The method includes patterning a plurality of trenches in the ILD …