Intrinsic parameter fluctuation and process variation effect of vertically stacked silicon nanosheet complementary field-effect transistors

SR Kola, Y Li, MH Chuang - 2023 24th International …, 2023 - ieeexplore.ieee.org
We study the variability of vertically stacked gate-all-around silicon nanosheet (GAA Si NS)
complementary field-effect transistors (CFETs). The process variation effect (PVE), the work …

Statistical Device Simulation and Machine Learning of Process Variation Effects of Vertically Stacked Gate-All-Around Si Nanosheet CFETs

SR Kola, Y Li, R Butola - IEEE Transactions on Nanotechnology, 2024 - ieeexplore.ieee.org
In this study, we report the process variation effect (PVE) including the work function
fluctuation (WKF) on the DC/AC characteristic fluctuation of stacked gate-all-around silicon …

Characteristic Variability of GAA Si NS CFETs Induced by Process Variation Effect and Intrinsic Parameter Fluctuation

MH Chuang, SR Kola, Y Li - 2024 International Conference on …, 2024 - ieeexplore.ieee.org
We simultaneously estimate impacts of process variation effect (PVE) consisting of three
major variations and intrinsic parameter fluctuation (IPF) including two crucial random …