A scanning microwave microscope (SMM) for spatially resolved capacitance measurements
in the attofarad-to-femtofarad regime is presented. The system is based on the combination …

The scanning microwave microscope is used for calibrated capacitance spectroscopy and
spatially resolved dopant profiling measurements. It consists of an atomic force microscope …

Nanoscale capacitance imaging with attofarad resolution (∼ 1 aF) of a nano-structured
oxide thin film, using ac current sensing atomic force microscopy, is reported. Capacitance …

In this paper, an analytical model for capacitance measurements by scanning microwave
microscopy (SMM)/scanning microwave spectroscopy is presented. The tip-sample …

A new method, scanning sawtooth capacitance spectroscopy (SSCS), is proposed to
measure a map of capacitance/voltage curves (C–V) by applying a low frequency voltage …

In this work, the influence of the tip geometry in scanning capacitance microscopy is
investigated experimentally and theoretically on metal-oxide-semiconductor-(MOS) and …

Kelvin probe force microscopy (KPFM) is used to investigate the electrostatic force between
a conductive probe and doped semiconductors. The observed frequency dependence of the …

In most atomic force microscopes (AFMs), the motion of the tip is detected by the deflection
of a laser beam shining onto the cantilever. AFM applications such as scanning capacitance …

In this paper, the dielectric constants of colloidal nanocrystals are investigated by scanning
capacitance microscopy (SCM) and scanning microwave microscopy (SMM). Whereas SMM …

摘要本文设计并实现了一种新的扫描探针显微镜的开放式控制系统. 该控制系统设计了灵活开放
的总线接口, 并对电路模块进行了优化, 采取了一系列抗干扰措施, 从而使之具备了接口开放 …