This paper reviews the recent developments of micro-electromechanical system (MEMS)
based electrostatically actuated tunable capacitors. MEMS based tunable capacitors …

We report on hybrid microtubes and rings fabricated from rolled-up strained metal–
semiconductor SiGe/Si/Cr and metal–insulator–semiconductor SiGe/Si/Si x N y/Cr films. For …

RF-MEMS technology has evolved significantly over the years, during which various
attempts have been made to tailor such devices for extreme performance by leveraging …

We demonstrate a label-free protein detection and separation technology for real-time
monitoring of proteins in micro/nanofluidic channels, confined surface plasmon resonance …

We demonstrate the existence of one-and two-dimensional (1D and 2D, respectively) bright
solitons in the Bose-Einstein condensate with repulsive dipole-dipole interactions induced …

Controllable formation and properties of solid single-crystal micro-and nanoshells of various
shapes (tubes and spirals, vertically positioned rings and cylinders, and bent and trough …

Intrinsic uncertainties of MEMS fabrication processes can severely affect the performance of
devices because the tolerance ranges of these processes are relatively large and …

A complementary metal-oxide-semiconductor (CMOS)-compatible one-mask process for the
design and fabrication of three-dimensional (3-D) microelectromechanical systems (MEMS) …

Closed-form solutions to the parallel plate problem have been derived for design of
electrostatic devices that employ the parallel plate. With dimensionless height and force …

This paper reports implementation and wafer-level testing of a self-assembled tunable
microelectromechanical systems (MEMS) inductor with electrostatic, electrothermal, and …