[HTML][HTML] A large-scale microelectromechanical-systems-based silicon photonics LiDAR

X Zhang, K Kwon, J Henriksson, J Luo, MC Wu - Nature, 2022 - nature.com
Abstract Three-dimensional (3D) imaging sensors allow machines to perceive, map and
interact with the surrounding world. The size of light detection and ranging (LiDAR) devices …

Technologies and applications of silicon-based micro-optical electromechanical systems: A brief review

S Chen, Y Zhang, X Hong, J Li - Journal of Semiconductors, 2022 - iopscience.iop.org
Micro-optical electromechanical systems (MOEMS) combine the merits of micro-
electromechanical systems (MEMS) and micro-optics to enable unique optical functions for a …

Two-dimensional scanning of silicon-based focal plane array with field-of-view splicing technology

L Cui, P Wang, Q Zhao, P Ma, Z Wang, L Yu, Y Yang… - Optics …, 2023 - opg.optica.org
All-solid-state beam scanning chip is ideal for next-generation LiDAR due to its reliability
and small size. Here we propose a focal plane array chip for two-dimensional scanning …

Lidar system based on lens assisted integrated beam steering

X Cao, G Qiu, K Wu, C Li, J Chen - Optics Letters, 2020 - opg.optica.org
We present a demonstration of solid-state light detection and ranging (Lidar) at 1550 nm by
applying integrated two-dimensional (2D) lens assisted beam-steering (LABS) technology …

Monolithic coherent LABS lidar based on an integrated transceiver array

C Li, K Wu, X Cao, G Zhang, T Li, Z Deng, M Chang… - Optics Letters, 2022 - opg.optica.org
We demonstrate a monolithic frequency-modulated continuous-wave (FMCW) lidar chip with
an integrated transceiver array based on lens-assisted beam steering (LABS) technology. It …

MOEMS-based lens-assisted beam steering for free-space optical communications

DA Goldman, P Serra, S Kacker… - Journal of Lightwave …, 2023 - ieeexplore.ieee.org
Free-space optical communication (FSOC) systems require precise pointing, acquisition,
and tracking to send and receive optical beams for effective operation. In a lens-assisted …

Review of lens-assisted beam steering methods

SJ Spector - Journal of Optical Microsystems, 2022 - spiedigitallibrary.org
Lens-assisted beam steering (LABS) has emerged as a promising solution for compact chip-
based optical beam steering for light detection and ranging (LiDAR) applications. In a LABS …

Laser beam steering of 532 nm using a power-efficient focal plane array

Z Wu, Y Zhang, S Zeng, S Lin, S Yu - Optics Letters, 2023 - opg.optica.org
Laser beam steering is important for classical and quantum information processing. On-chip
beam steering is a major motivation for developing large-scale photonic integrated circuits …

Large-scale silicon photonics focal plane switch array for optical beam steering

X Zhang, K Kwon, J Henriksson, J Luo… - Optical Fiber …, 2021 - opg.optica.org
We report on 128× 128-element two-dimensional silicon photonics focal plane switch arrays
with microelectromechanical-system optical switches for random-access optical beam …

Algorithmically calibrated optical switch with high-extinction-ratio and low-polarization-dependence on 3-μm-thick SOI platform

A Li, N Zhao, C Liu, R Lu, R Wang, C Qiu, A Wu - Optics Communications, 2024 - Elsevier
Crosstalk, calibration complexity, and polarization dependence obstacle the precision of
optical networks such as microwave photonics beamforming networks (MPBNs). The optical …