Solid-state dewetting of thin films

CV Thompson - Annual Review of Materials Research, 2012 - annualreviews.org
Solid films are usually metastable or unstable in the as-deposited state, and they will dewet
or agglomerate to form islands when heated to sufficiently high temperatures. This process …

How to control solid state dewetting: A short review

F Leroy, F Cheynis, Y Almadori, S Curiotto… - Surface Science …, 2016 - Elsevier
In the past decade there have been many theoretical and experimental efforts to study the
mechanisms of solid state dewetting, that means the spontaneous agglomeration of a thin …

Surface-energy-driven dewetting theory of silicon-on-insulator agglomeration

DT Danielson, DK Sparacin, J Michel… - Journal of applied …, 2006 - pubs.aip.org
The thermal agglomeration of ultrathin (< 30 nm) single crystal silicon-on-insulator (SOI)
films is a morphological evolution phenomenon with practical and scientific importance. This …

Templated Solid‐State Dewetting to Controllably Produce Complex Patterns

J Ye, CV Thompson - Advanced Materials, 2011 - infona.pl
Templated formation of complex patterns via solid‐state dewetting is demonstrated. Thin
films often dewet from their substrates when they are heated, even while remaining in the …

Dewetting mechanisms and their exploitation for the large-scale fabrication of advanced nanophotonic systems

J Ye, D Zuev, S Makarov - International Materials Reviews, 2019 - Taylor & Francis
Recent progress in submicron-and nano-fabrication technologies has led to the emergence
of novel photonic structures such as optical nanoantennas and metasurfaces. Real-life …

Multiple gate devices: advantages and challenges

T Poiroux, M Vinet, O Faynot, J Widiez, J Lolivier… - Microelectronic …, 2005 - Elsevier
As device scaling is entering the sub-25nm range, multiple gate device architectures are
needed to fulfill the ITRS requirements, since they offer a greatly improved electrostatic …

Surface diffusion dewetting of thin solid films: Numerical method and application to

E Dornel, JC Barbe, F De Crécy, G Lacolle… - Physical Review B …, 2006 - APS
A method has been developed to calculate and use a surface chemical potential which is
valid in the large curvature regime for any surface energy function. It is applied to the solid …

Anisotropic edge retraction and hole growth during solid-state dewetting of single crystal nickel thin films

J Ye, CV Thompson - Acta materialia, 2011 - Elsevier
At elevated temperatures, single crystal thin films sometimes undergo solid-state dewetting
to form holes and islands with anisotropic morphologies and regular features. We have …

Self‐Assembly of Nanocrystalline Structures from Freestanding Oxide Membranes

V Harbola, YJ Wu, H Wang, S Smink… - Advanced …, 2023 - Wiley Online Library
The exploration of crystalline nanostructures enhances the understanding of quantum
phenomena occurring in spatially confined quantum matter and may lead to functional …

Agglomeration control during the selective epitaxial growth of Si raised sources and drains on ultra-thin silicon-on-insulator substrates

C Jahan, O Faynot, L Tosti, JM Hartmann - Journal of crystal growth, 2005 - Elsevier
We have studied the impact of several Si selective epitaxial growth (SEG) process on the
agglomeration of ultra-thin, patterned silicon-on-insulator (SOI) layers. Through a careful …