The semiconductor industry continues to produce ever smaller devices that are ever more
complex in shape and contain ever more types of materials. The ultimate sizes and …

The international technology roadmap of semiconductors (ITRS) is approaching the
historical end point and we observe that the semiconductor industry is driving …

Optical metrology is one of the key technologies in today's manufacturing industry. In this
article, we provide an insight into optical measurement technologies for precision …

When the international technology roadmap of semiconductors (ITRS) started almost five
decades ago, the metal oxide effect transistor (MOSFET) as units in integrated circuits (IC) …

Resonant soft X‐ray scattering (RSoXS) is an emerging, powerful technique to probe the
nano‐to‐mesoscale structure of polymers and other molecules. It joins together small‐angle …

Xi-cam is an extensible platform for data management, analysis and visualization. Xi-cam
aims to provide a flexible and extensible approach to synchrotron data treatment as a …

Block-copolymers self-assemble into diverse morphologies, where nanoscale order can be
finely tuned via block architecture and processing conditions. However, the ultimate usage …

This review presents the author's view on modern trends in the development of charged
particle accelerators for various applications, which is based on his own experience in this …

Conspectus Electrocatalysts play an important role in catalyzing the kinetics for oxygen
reduction and oxygen evolution reactions for many air-based energy storage and …

Terahertz radiation for inspection and fault detection has been of interest for the
semiconductor industry since the first generation and detection of THz signals. Until recent …