Atomic layer deposition (ALD) is gaining attention as a thin film deposition method, uniquely suitable for depositing uniform and conformal films on complex three-dimensional …
A Imran, Q Zhu, M Sulaman… - Advanced Optical …, 2023 - Wiley Online Library
The demand for charge‐coupled device (CCD) imagers has surged exponentially during the last decade owing to their exceptionally high quality and low noise imaging. However, they …
Proteins are structurally dynamic macromolecules, and it is challenging to quantify the conformational properties of their native state in solution. Nanopores can be efficient tools to …
We present a study of double-and single-stranded DNA transport through nanopores fabricated in ultrathin (2–7 nm thick) freestanding hafnium oxide (HfO2) membranes. The …
OME Ylivaara, X Liu, L Kilpi, J Lyytinen, D Schneider… - Thin Solid Films, 2014 - Elsevier
Use of atomic layer deposition (ALD) in microelectromechanical systems (MEMS) has increased as ALD enables conformal growth on 3-dimensional structures at relatively low …
SH Jen, JA Bertrand, SM George - Journal of Applied Physics, 2011 - pubs.aip.org
Al 2 O 3 atomic layer deposition (ALD) is a model ALD system and Al 2 O 3 ALD films are excellent gas diffusion barrier on polymers. However, little is known about the response of Al …
The presence of excess hydrogen at the interface between a metal substrate and a protective oxide can cause blistering,, and spallation of the scale,,,,. However, it remains …
S Lee, JH Han, SH Lee, GH Baek, JS Park - Jom, 2019 - Springer
Recent trends in thin film encapsulations (TFEs), fabricating organic/inorganic encapsulation films are reviewed. Atomic layer deposited inorganic films have superior barrier performance …
JT Gaskins, PE Hopkins, DR Merrill… - ECS Journal of Solid …, 2017 - iopscience.iop.org
Atomic layer deposited (ALD) high-dielectric-constant (high-k) materials have found extensive applications in a variety of electronic, optical, optoelectronic, and photovoltaic …