Advances in AFM for the electrical characterization of semiconductors

RA Oliver - Reports on Progress in Physics, 2008 - iopscience.iop.org
Atomic force microscopy (AFM) is a key tool for nanotechnology research and finds its
principal application in the determination of surface topography. However, the use of the …

Nanoscale transport properties at silicon carbide interfaces

F Roccaforte, F Giannazzo… - Journal of Physics D …, 2010 - iopscience.iop.org
Wide bandgap semiconductors promise devices with performances not achievable using
silicon technology. Among them, silicon carbide (SiC) is considered the top-notch material …

Nanoscale electrical characterization of semiconducting polymer blends by conductive atomic force microscopy (C-AFM)

A Alexeev, J Loos, MM Koetse - Ultramicroscopy, 2006 - Elsevier
For the first time local electrical characteristics of a blend of two semiconducting polymers
were studied with conductive atomic force microscopy (C-AFM). The investigated mixture is …

Dopant, composition and carrier profiling for 3D structures

W Vandervorst, C Fleischmann, J Bogdanowicz… - Materials Science in …, 2017 - Elsevier
With the transition from planar to three-dimensional device architectures, devices such as
FinFETs, TFETs and nanowires etc. become omnipresent. This requires the dopant atom …

Scanning spreading resistance microscopy current transport studies on doped semiconductors

RP Lu, KL Kavanagh, SJ Dixon-Warren… - Journal of Vacuum …, 2002 - pubs.aip.org
Two-dimensional (2D) carrier concentration profiling using scanning spreading resistance
microscopy (SSRM) has been carried out on molecular beam epitaxy-grown GaAs and InP …

Electrical scanning probe microscopy: Investigating the inner workings of electronic and optoelectronic devices

SB Kuntze, D Ban, EH Sargent… - Critical Reviews in …, 2005 - Taylor & Francis
Semiconductor electronic and optoelectronic devices such as transistors, lasers, modulators,
and detectors are critical to the contemporary computing and communications infrastructure …

Direct imaging of the depletion region of an InP junction under bias using scanning voltage microscopy

D Ban, EH Sargent, SJ Dixon-Warren, I Calder… - Applied physics …, 2002 - pubs.aip.org
We directly image an InP p–n junction depletion region under both forward and reverse bias
using scanning voltage microscopy (SVM), a scanning probe microscopy (SPM) technique …

Access to residual carrier concentration in ZnO nanowires by calibrated scanning spreading resistance microscopy

L Wang, JM Chauveau, R Brenier, V Sallet… - Applied Physics …, 2016 - pubs.aip.org
Scanning spreading resistance microscopy (SSRM) was performed on non-intentionally
doped (nid) ZnO nanowires (NWs) grown by metal-organic chemical vapor deposition in …

Two-dimensional profiling of carriers in a buried heterostructure multi-quantum-well laser: Calibrated scanning spreading resistance microscopy and scanning …

D Ban, EH Sargent, SJ Dixon-Warren… - Journal of Vacuum …, 2002 - pubs.aip.org
We report results of a scanning spreading resistance microscopy (SSRM) and scanning
capacitance microscopy (SCM) study of the distribution of charge carriers inside multi …

Diameter-dependent boron diffusion in silicon nanowire-based transistors

A Schulze, A Florakis, T Hantschel, P Eyben… - Applied Physics …, 2013 - pubs.aip.org
We analyzed the carrier profile in silicon nanowire-based tunnel-FETs as a function of
nanowire diameter using scanning spreading resistance microscopy. The nanowires were …