Method for making a semiconductor device with strain enhancement

D Zhang, BY Nguyen, VY Thean, Y Shiho… - US Patent …, 2007 - Google Patents
US7282415B2 - Method for making a semiconductor device with strain enhancement - Google
Patents US7282415B2 - Method for making a semiconductor device with strain enhancement …

Defect reduction for formation of epitaxial layer in source and drain regions

CH Tsai, CC Su, TM Kwok - US Patent 9,076,734, 2015 - Google Patents
The embodiments of mechanisms for forming source/drain (S/D) regions of field effect
transistors (FETs) described enable forming an epitaxially grown silicon-containing layer …

Nonplanar semiconductor device with partially or fully wrapped around gate electrode and methods of fabrication

SA Hareland, RS Chau, BS Doyle, R Rios… - US Patent …, 2010 - Google Patents
A nonplanar semiconductor device and its method of fabrication is described. The nonplanar
semiconductor device includes a semiconductor body having a top surface opposite a …

Semiconductor transistor having a backfilled channel material

AS Murthy, BS Doyle, BE Roberds - US Patent 6,605,498, 2003 - Google Patents
2). Discussion of Related Art Integrated circuits are often manufactured in and on Silicon and
other Semiconductor wafers. Such integrated circuits include literally millions of metal oxide …

Block contact architectures for nanoscale channel transistors

M Radosavljevic, A Majumdar, BS Doyle… - US Patent …, 2011 - Google Patents
A contact architecture for nanoscale channel devices having contact structures coupling to
and extending between source or drain regions of a device having a plurality of parallel …

Process for integrating planar and non-planar CMOS transistors on a bulk substrate and article made thereby

JT Kavalieros, JK Brask, BS Doyle, U Shah… - US Patent …, 2009 - Google Patents
US7479421B2 - Process for integrating planar and non-planar CMOS transistors on a bulk
substrate and article made thereby - Google Patents US7479421B2 - Process for integrating …

Transistor structure with thick recessed source/drain structures and fabrication process of same

A Bryant, MD Jaffe - US Patent 6,870,225, 2005 - Google Patents
The present invention relates generally to the field of Semiconductor processing and, more
Specifically, to a fab rication process for a transistor Structure with thick recessed …

Methods for patterning a semiconductor film

JK Brask, J Kavalieros, U Shah, S Datta… - US Patent …, 2009 - Google Patents
According to an embodiment of the present invention, a hard mask material is formed on a
silicon film having a global crystal orientation wherein the semiconductor film has a first …

Process for integrating planar and non-planar CMOS transistors on a bulk substrate and article made thereby

JT Kavalieros, JK Brask, BS Doyle, U Shah… - US Patent …, 2012 - Google Patents
US8193567B2 - Process for integrating planar and non-planar CMOS transistors on a bulk
substrate and article made thereby - Google Patents US8193567B2 - Process for integrating …

Method of fabricating a field effect transistor structure with abrupt source/drain junctions

AS Murthy, RS Chau, P Morrow, CH Jan… - US Patent …, 2005 - Google Patents
BACKGROUND OF THE INVENTION 1. Field of the Invention The invention relates to metal-
oxide-Semiconductor field effect transistors (MOSFETs) and more particularly to transistor …