AlN has been widely used as the piezoelectric thin film layer in film bulk acoustic wave resonator (FBAR). The performance of FBAR is influenced by various geometrical …
As the telecommunication industry moves towards 5G to support the increasing demand for broadband services, development of new front-end technologies is gaining steam to target …
Tunable and switchable BST FBAR with different composition (BST6040 doped and undoped, BST7030, BST8020 and BST9010) are designed, simulated and fabricated on …