Design and applications of MEMS flow sensors: A review

F Ejeian, S Azadi, A Razmjou, Y Orooji… - Sensors and Actuators A …, 2019 - Elsevier
There is an indispensable need for fluid flow rate and direction sensors in various medical,
industrial and environmental applications. Besides the critical demands on sensing range of …

Micromachined biomimetic artificial haircell sensors

C Liu - Bioinspiration & biomimetics, 2007 - iopscience.iop.org
The biological haircell is a modular building block of a rich variety of biological sensors.
Using micro-and nanofabrication technology, an engineering equivalent artificial haircell …

[图书][B] Modeling mems and nems

JA Pelesko, DH Bernstein - 2002 - api.taylorfrancis.com
Designing small structures necessitates an a priori understanding of various device
behaviors. The way to gain such understanding is to construct, analyze, and interpret the …

[图书][B] Reconfigurable antennas

JT Bernhard - 2007 - books.google.com
This lecture explores the emerging area of reconfigurable antennas from basic concepts that
provide insight into fundamental design approaches to advanced techniques and examples …

Elastically and plastically foldable electrothermal micro‐origami for controllable and rapid shape morphing

Y Zhu, M Birla, KR Oldham… - Advanced Functional …, 2020 - Wiley Online Library
Integrating origami principles within traditional microfabrication methods can produce shape
morphing microscale metamaterials and 3D systems with complex geometries and …

Microassembly of 3-D microstructures using a compliant, passive microgripper

N Dechev, WL Cleghorn, JK Mills - Journal of …, 2004 - ieeexplore.ieee.org
This paper describes a novel microassembly system that can be used to construct out-of-
plane three-dimensional (3-D) microstructures. The system makes use of a surface …

Distant touch hydrodynamic imaging with an artificial lateral line

Y Yang, J Chen, J Engel, S Pandya… - Proceedings of the …, 2006 - National Acad Sciences
Nearly all underwater vehicles and surface ships today use sonar and vision for imaging
and navigation. However, sonar and vision systems face various limitations, eg, sonar blind …

MEMS based hair flow-sensors as model systems for acoustic perception studies

GJM Krijnen, M Dijkstra, JJ van Baar… - …, 2006 - iopscience.iop.org
Arrays of MEMS fabricated flow sensors inspired by the acoustic flow-sensitive hairs found
on the cerci of crickets have been designed, fabricated and characterized. The hairs consist …

Artificial sensory hairs based on the flow sensitive receptor hairs of crickets

M Dijkstra, JJ Van Baar, RJ Wiegerink… - Journal of …, 2005 - iopscience.iop.org
This paper presents the modelling, design, fabrication and characterization of flow sensors
based on the wind-receptor hairs of crickets. Cricket sensory hairs are highly sensitive to …

Two-dimensional micromachined flow sensor array for fluid mechanics studies

J Chen, Z Fan, J Zou, J Engel, C Liu - Journal of Aerospace …, 2003 - ascelibrary.org
We discuss two types of micromachined flow sensors realized by using novel
microfabrication processes—a hot-wire anemometer (based on thermal transfer) and a …