Fine Pitch Aluminum Hybrid Bonding: Overcoming the Challenges in Plating, Passivation and Bonding

Investigations on Low-Temperature Aluminium Thermocompression Bonding Using Surface Passivation Technique

K Diex, T Jäckel, V Dubey, D Wünsch… - … Workshop on Low …, 2024 - ieeexplore.ieee.org
In this study, the low-temperature metal bonding of aluminum (AI) was investigated using an
in-situ surface passivation. Specifically, the influence of a passivation layer was investigated …
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