A simple reflow method for fabrication of refractive microlens arrays in inorganic–organic
SiO_2–ZrO_2 solgel glass is presented. To our knowledge, this is the first report that …

Zirconium oxide (ZrO2) is a well-studied and promising material due to its remarkable
chemical and physical properties. It is used, for example, in coatings for corrosion protection …

A negative-tone inorganic? organic hybrid SiO_2: TiO_2 glass is investigated for fabrication
of refractive microlenses. This sol-gel material enjoys an advantage over materials used in …

A current trend of applied research in the field of nanomaterials is the integration of bottom
up and top down fabrication methods. Sol–gel chemistry is widely applied to obtain different …

In this article the effects induced by exposure of sol–gel thin films to hard X-rays have been
studied. Thin films of silica and hybrid organic–inorganic silica have been prepared via dip …

Photosensitive hybrid titania films have been prepared from titanium butoxide modified with
β‐diketone and methacrylic acid. When this film is exposed to UV light, the β‐diketonato …

Single-step fabrication of diffractive surface relief gratings on an ultraviolet (UV) sensitive
hybrid sol–gel glass is presented. The gratings are imprinted on the negative-tone sol–gel …

In this paper, we present a novel reflow technique for the fabrication of an elliptical microlens
array in sol-gel glass. The fabricated refractive microlens array has a very smooth surface …

We developed specific negative tone resists suitable for preparing periodic inorganic
nanostructures by ArF photolithography. This approach is based on the sol–gel chemistry of …

A negative-tone sensitive SiO2/TiO2 organic-inorganic hybrid sol-gel material was
synthesized and characterized for fabrication of multilevel micro-optical elements by direct …