Micro-textured surfaces are widely used in aerospace, electronics, biomedical, optics and
other fields due to their excellent properties. By now there are many ways to obtain the …

A comprehensive review of the modeling approaches used to simulate the behaviors of
micro/nano-gyroscopes is presented. The performance and sensitivity of these inertial …

This paper studies a high-precision etching process based on focused ion beam static
trimming of the defective mass of fused silica hemispherical resonators to eliminate …

This paper reports an in-run automatic mode-matching method of whole-angle (WA) micro-
hemispherical resonator gyroscope (HRG) based on standing wave self-precession. When …

MEMS gyroscopes play an important role in inertial navigation measurements, which mainly
works in n= 2 mode. However, mode matching is the basis for high-precision detection …

Bias accuracy of micromachined gyroscope is deteriorated severely when suffering from
unknown environmental disturbances (UD), such as temperature, vibration, and shock. In …

Abstract The DSP (Digital Signal Processing) implementation of two Duffing-type micro-
electro-mechanical systems (MEMS) gyros and their event-triggered neural backstepping …

Laser trimming promises an increasing yield in microfabrication for the high performance
Micro Electro-Mechanical Systems (MEMS) resonant devices by overcoming manufacturing …

In this paper, a triple mass resonator (TMR) with a high capability to independently tune both
resonant frequency and quality factor (Q-factor) is reported. An additive oscillating structure …

Advancements in light modulator technology have been driving discoveries and progress
across various fields. The problem of large-scale coherent optical control of atomic quantum …