This is a topical review on advanced lithographic methods used to create 3D topographies.
We start the discussion with the principal capabilities of grayscale electron beam lithography …

Fine scale, periodic structures offer designers additional freedom to create novel functions or
combinations of functions. This emerging field of “structured” surfaces is poorly defined. This …

We present the fabrication of 3D adiabatically tapered structures, for efficient coupling from
an optical fiber, or free-space, to a chip. These structures are fabricated integrally with …

This paper demonstrates the use of microlens projection lithography using gray-scale masks
to fabricate arrays of microstructures in photoresist. In microlens projection lithography, an …

Mechanically stable zeolite monoliths containing three‐dimensional, ordered, closed
macropores (see Figure) have been fabricated by hydrothermal treatment of nanozeolite …

Photonic crystals and nanophotonics have received a great deal of attention over the last
decade, largely due to improved numerical modeling and advances in fabrication …

The grayscale photomask plays a key role in grayscale lithography for creating 3D
microstructures like micro-optical elements and MEMS structures, but how to fabricate …

6,184,608 B1 2/2001 Cabuz et al. 6.215, 221 B1 4/2001 Cabuz et al. 6,240,944 B1 6/2001.
Ohnstein et al. 6.255, 758 B1 7/2001 Cabuz et al. 6.288. 472 B1 9/2001 Cabuz et al …

A kinoform lens is a highly efficient photonic device capable of focusing a wide range of
electromagnetic radiation. Unfortunately, its realization without the need of any …

A simple method for the fabrication of diffraction elements and arrays of micro‐optical
elements, using an array of microlenses, is demonstrated. The resulting diffraction patterns …