Non-equilibrium in low-temperature plasmas
F Taccogna, G Dilecce - The European Physical Journal D, 2016 - Springer
The wide range of applications of cold plasmas originates from their special characteristic of
being a physical system out of thermodynamic equilibrium. This property enhances its …
being a physical system out of thermodynamic equilibrium. This property enhances its …
Experimental and theoretical investigation of the control and balance of active sites on oxygen plasma-functionalized MoSe2 nanosheets for efficient hydrogen …
Plasma functionalization is an effective method to improve the electrocatalytic activity of
catalysts for the hydrogen evolution reaction (HER), but the relationship between the plasma …
catalysts for the hydrogen evolution reaction (HER), but the relationship between the plasma …
eduPIC: an introductory particle based code for radio-frequency plasma simulation
Particle based simulations are indispensable tools for numerical studies of charged particle
swarms and low-temperature plasma sources. The main advantage of such approaches is …
swarms and low-temperature plasma sources. The main advantage of such approaches is …
Electron bounce-cyclotron resonance in capacitive discharges at low magnetic fields
S Patil, S Sharma, S Sengupta, A Sen… - Physical Review …, 2022 - APS
We report the existence of an enhanced operating regime for a high-frequency, low-
pressure capacitively coupled plasma (CCP) discharge in the presence of a weak magnetic …
pressure capacitively coupled plasma (CCP) discharge in the presence of a weak magnetic …
Modeling of plasma processing reactors: review and perspective
Low temperature plasmas (LTPs) are widely used in the semiconductor industry to etch,
deposit, modify, and pattern thin films during the fabrication of integrated circuits. Modeling …
deposit, modify, and pattern thin films during the fabrication of integrated circuits. Modeling …
Electron power absorption dynamics in magnetized capacitively coupled radio frequency oxygen discharges
The influence of a uniform magnetic field parallel to the electrodes on radio frequency
capacitively coupled oxygen discharges driven at 13.56 MHz at a pressure of 100 mTorr is …
capacitively coupled oxygen discharges driven at 13.56 MHz at a pressure of 100 mTorr is …
Spatial flux and energy asymmetry in a low pressure capacitively coupled plasma discharge excited by sawtooth waveform: A harmonic study
Plasma asymmetry generation in capacitively coupled plasma (CCP) discharges provides
control over vital parameters that are useful in many plasma processing applications. In this …
control over vital parameters that are useful in many plasma processing applications. In this …
2D particle-in-cell simulations of geometrically asymmetric low-pressure capacitive RF plasmas driven by tailored voltage waveforms
The effects of the simultaneous presence of two different types of plasma asymmetry, viz,
geometric and electrical, on low-pressure capacitively coupled argon discharges are studied …
geometric and electrical, on low-pressure capacitively coupled argon discharges are studied …
On electron heating in a low pressure capacitively coupled oxygen discharge
JT Gudmundsson, DI Snorrason - Journal of Applied Physics, 2017 - pubs.aip.org
We use the one-dimensional object-oriented particle-in-cell Monte Carlo collision code
oopd1 to explore the charged particle densities, the electronegativity, the electron energy …
oopd1 to explore the charged particle densities, the electronegativity, the electron energy …
Ion energy and angular distributions in low-pressure capacitive oxygen RF discharges driven by tailored voltage waveforms
We investigate the energy and angular distributions of ions reaching the electrodes in low-
pressure, capacitively coupled oxygen radio-frequency discharges. These distributions, as …
pressure, capacitively coupled oxygen radio-frequency discharges. These distributions, as …