Microelectromechanical system (MEMS) reveals excellent flexibility and adaptability in
miniaturization devices owing to its compact dimension, low power consumption, and fine …

This paper presents a review of electrothermal micro-actuators and applications.
Electrothermal micro-actuators have been a significant research interest over the last two …

The development of a SU-8-based microgripper that can operate in physiological ionic
solutions is presented. The electrothermally activated polymer gripper consists of two" hot …

This paper addresses the design and optimization of thermal actuators employed in a novel
MEMS-based material testing system. The testing system is designed to measure the …

Thermomechanical microactuators possess a number of desirable attributes including ease
of fabrication and large force and displacement capabilities relative to other types of …

We propose a design for a building block of a periodic cellular material that mimics the
salient behaviors, superelasticity and shape memory, exhibited by shape memory alloys …

At the micro-scale, thermal actuation provides larger forces compared to the widely-used
electrostatic actuation. In this paper, we highlight another advantage of thermal actuation …

An analytical solution of the thermoelastic bending/buckling problem of thermal
microactuators is presented. V-shaped beam actuators are modeled using the theory of …

This work addresses a range of issues on modeling electrothermal microactuators, including
the physics of temperature dependent material properties and Finite Element Analysis (FEA) …

The integration of microactuators within a silicon photonic chip gave rise to the field of
optical micro‐electro‐mechanical systems (MEMS) that was originally driven by the …