Progress in self-powered, multi-parameter, micro sensor technologies for power metaverse and smart grids
Y Fan, L Zhang, D Li, Z Wang - Nano Energy, 2023 - Elsevier
Power metaverse and smart grids are the future of power systems, with a focus on
intelligence, digitization, and informatization. Their foundation is electricity data acquisition …
intelligence, digitization, and informatization. Their foundation is electricity data acquisition …
[HTML][HTML] A Review on Resonant MEMS Electric Field Sensors
Electric field sensors (EFSs) are widely used in various fields, particularly in accurately
assessing atmospheric electric fields and high-voltage power lines. Precisely detecting …
assessing atmospheric electric fields and high-voltage power lines. Precisely detecting …
Review on sensors for electric fields near power transmission systems
W Hortschitz, A Kainz, R Beigelbeck… - Measurement …, 2024 - iopscience.iop.org
Due to the necessary transition to renewable energy, the transport of electricity over long
distances will become increasingly important, since the sites of sustainable electricity …
distances will become increasingly important, since the sites of sustainable electricity …
Utilizing mechanical micro-lever coupling structure to enhance sensitivity in mode-localized MEMS accelerometer
Z Wang, XY Xiong, KF Wang, WH Yang… - Sensors and Actuators A …, 2023 - Elsevier
The sensitivity of the resonant sensors has been proven to be remarkably enhanced by
using mode localization of the weakly coupled resonators as the sensing mechanism. This …
using mode localization of the weakly coupled resonators as the sensing mechanism. This …
Wafer-level vacuum-packaged electric field microsensor: Structure design, theoretical model, microfabrication, and characterization
J Liu, S Xia, C Peng, Z Wu, Z Chu, Z Zhang, H Lei… - Micromachines, 2022 - mdpi.com
This paper proposes a novel wafer-level vacuum packaged electric field microsensor (EFM)
featuring a high quality factor, low driving voltage, low noise, and low power consumption …
featuring a high quality factor, low driving voltage, low noise, and low power consumption …
A single-chip 3-D electric field microsensor with piezoelectric excitation
S Peng, Z Zhang, X Liu, Y Gao, W Zhang… - … on Electron Devices, 2023 - ieeexplore.ieee.org
This article proposes a single-chip 3-D electric field microsensor (3-D EFM) with
piezoelectric excitation to reduce the excitation voltage and crosstalk noise and improve the …
piezoelectric excitation to reduce the excitation voltage and crosstalk noise and improve the …
Piezoelectric PZT film-driven resonant torsional MEMS electric field sensor
K Ke, Q Yang, J Zhou, Z Qiu, Z Yao… - IEEE Sensors …, 2024 - ieeexplore.ieee.org
Electric field measurements are crucial to monitor the electromagnetic environment in
substations, measuring voltage on transmission lines, and assessing the condition of …
substations, measuring voltage on transmission lines, and assessing the condition of …
A Highly Sensitive and High-Resolution Resonant MEMS Electrostatic Field Microsensor Based on Electrostatic Stiffness Perturbation
X Liu, S Xia, C Peng, Y Gao, S Peng, Z Zhang… - Micromachines, 2023 - mdpi.com
This paper proposes a highly sensitive and high-resolution resonant MEMS electrostatic
field sensor based on electrostatic stiffness perturbation, which uses resonant frequency as …
field sensor based on electrostatic stiffness perturbation, which uses resonant frequency as …
A Wafer-Level Vacuum-Packaged Vertical Resonant Electric Field Microsensor
Y Gao, X Liu, S Peng, W Zhang, Y Liu… - … on Electron Devices, 2023 - ieeexplore.ieee.org
This article presents a wafer-level vacuum-packaged vertical resonant electric field
microsensor (EFM), which uses an anodic bonded glass in silicon, silicon on insulator, and …
microsensor (EFM), which uses an anodic bonded glass in silicon, silicon on insulator, and …
A sensor for 3-D component measurement of synthetic electric field vector in HVDC transmission lines using unidirectional motion
C Liu, H Yuan, J Lv, P Zhao, J Li… - IEEE Transactions on …, 2022 - ieeexplore.ieee.org
High voltage direct current (HVDC) transmission lines have been widely used in China, and
the electromagnetic effects of the synthetic electric field generated by them on the …
the electromagnetic effects of the synthetic electric field generated by them on the …