The review will describe the various scanning probe microscopy tips and cantilevers used
today for scanning force microscopy and magnetic force microscopy. Work undertaken to …

Abstract The revised International System of Units (SI) came into force on May 20, 2019.
Simultaneously, updated versions of supporting documents for the practical realization of the …

The Handbook of Surface and Nanometrology explains and challenges current concepts in
nanotechnology. It covers in great detail surface metrology and nanometrology and more …

This new edition of the bestselling Microlithography: Science and Technology provides a
balanced treatment of theoretical and operational considerations, from elementary concepts …

This paper presents the state of the art in scanning force microscopy for dimensional
metrology. A detailed description is given of the important factors affecting the major …

Surface topology measurements of micro-or nanostructures are essential for both scientific
and industrial applications. However, high-throughput measurements remain challenging in …

An atomic force microscope with a high-resolution three-axis laser interferometer for real-
time correction of distorted topographic images has been constructed and investigated. With …

The 2019 revision of the International System of Units (SI) linked the seven base units to
fundamental constants; only a minor rewording was necessary for the metre whose …

Nanoelectronics is changing the way the world communicates, and is transforming our daily
lives. Continuing Moore's law and miniaturization of low-power semiconductor chips with …

A metrological atomic force microscope with a tip-tilting mechanism (tilting-mAFM) has been
developed to expand the capabilities of 3D nanometrology, particularly for high-resolution …