Thin film piezoelectrics for MEMS

S Trolier-McKinstry, P Muralt - Journal of Electroceramics, 2004 - Springer
Thin film piezoelectric materials offer a number of advantages in microelectromechanical
systems (MEMS), due to the large motions that can be generated, often with low hysteresis …

Sezawa SAW devices: Review of numerical-experimental studies and recent applications

F Hadj-Larbi, R Serhane - Sensors and Actuators A: Physical, 2019 - Elsevier
The technological field of surface acoustic wave (SAW) devices has progressed rapidly. The
fundamental Rayleigh mode has been mainly used in SAW applications, while the …

Materials for bulk acoustic wave (BAW) resonators and filters

HP Löbl, M Klee, R Milsom, R Dekker… - Journal of the European …, 2001 - Elsevier
Thin film bulk acoustic wave (BAW) resonators and filters are appropriate for mobile
communication systems operating at high frequencies between 1–10 GHz. The resonance …

Superhigh-frequency surface-acoustic-wave transducers using AlN layers grown on SiC substrates

Y Takagaki, PV Santos, E Wiebicke, O Brandt… - Applied Physics …, 2002 - pubs.aip.org
We demonstrate the operation of surface-acoustic-wave SAW transducers fabricated on
AlN/SiC structures at frequencies as high as 19 GHz. The high SAW velocity of the AlN film is …

Low propagation loss in a one-port SAW resonator fabricated on single-crystal diamond for super-high-frequency applications

S Fujii, T Odawara, H Yamada, T Omori… - IEEE transactions on …, 2013 - ieeexplore.ieee.org
Diamond has the highest known SAW phase velocity, sufficient for applications in the
gigahertz range. However, although numerous studies have demonstrated SAW devices on …

[PDF][PDF] Finite element analysis of surface acoustic wave resonators

T Kannan - 2006 - harvest.usask.ca
Surface Acoustic Wave (SAW) devices are key components in RF and IF stages of many
electronic systems. A Surface Acoustic wave is a mechanical wave, which is excited on the …

Surface acoustic wave devices based on nanocrystalline diamond and aluminium nitride

F Bénédic, MB Assouar, F Mohasseb… - Diamond and related …, 2004 - Elsevier
Due to its high-acoustic velocity, diamond, when combined with piezoelectric material, has a
promising potentiality for high frequency surface acoustic wave (SAW) devices. In the …

High-frequency and high-temperature stable surface acoustic wave devices on ZnO/SiO2/SiC structure

Z Lu, S Fu, Z Chen, J Shen, R Su, R Wang… - Journal of Physics D …, 2020 - iopscience.iop.org
The explosive growth of wireless communication and the creation of new frequency bands
for 5G systems increasingly require surface acoustic wave (SAW) with high operating …

High-frequency surface acoustic wave resonator with ScAlN/hetero-epitaxial diamond

Y Kobayashi, T Tsuchiya, M Okazaki, Y Asao… - Diamond and related …, 2021 - Elsevier
High-frequency and wideband surface acoustic wave (SAW) devices have become an
important topic in 5G communication systems and beyond. For this purpose, piezoelectric …

Surface acoustic wave propagation characteristics of aluminum nitride thin films grown on polycrystalline diamond

GF Iriarte - Journal of Applied Physics, 2003 - pubs.aip.org
Diamond has the highest surface acoustic wave (SAW) velocity among all materials and
thus provides substantial advantages for the fabrication of high-frequency SAW devices …