Reliable fabrication of micro/nanostructures with sub-10 nm features is of great significance
for advancing nanoscience and nanotechnology. While the capability of current …

Atomically precise manufacturing (APM) is a key technique that involves the direct control of
atoms in order to manufacture products or components of products. It has been developed …

Abstract The Materials Genome Initiative (MGI) has streamlined the materials discovery effort
by leveraging generic traits of materials, with focus largely on perfect solids. Defects such as …

Tip-based nanofabrication (TBN) is a family of emerging nanofabrication techniques that use
a nanometer scale tip to fabricate nanostructures. In this review, we first introduce the history …

Scanning tunneling microscope (STM) has presented a revolutionary methodology to
nanoscience and nanotechnology. It enables imaging of the topography of surfaces …

In this study, atomic layer deposition (ALD) of nanoscale boron oxide (B 2 O 3) films on Si
using BCl 3/H 2 O precursors at room temperature was investigated using in situ x-ray …

The atomistic structure of the tip apex plays a crucial role in performing reliable atomic-scale
surface and adsorbate manipulation using scanning probe techniques. We have developed …

In this work, we show the feasibility of extreme ultraviolet (EUV) patterning on an HF-treated
silicon (100) surface in the absence of a photoresist. EUV lithography is the leading …

Even the quantum simulation of an apparently simple molecule such as Fe2S2 requires a
considerable number of qubits of the order of 106, while more complex molecules such as …

Silicon thin films were deposited at room temperature with electron-enhanced atomic layer
deposition (EE-ALD) using sequential exposures of disilane (Si 2 H 6) and electrons. EE …