Atomic layer deposition of silicon nitride thin films: a review of recent progress, challenges, and outlooks

X Meng, YC Byun, HS Kim, JS Lee, AT Lucero… - Materials, 2016 - mdpi.com
With the continued miniaturization of devices in the semiconductor industry, atomic layer
deposition (ALD) of silicon nitride thin films (SiNx) has attracted great interest due to the …

FinFET with high mobility and strain channel

CL Shen, KC Tsai, HJ Li, CS Liang, KT Lai… - US Patent …, 2014 - Google Patents
An integrated circuit device includes a fin at least partially embedded in a shallow trench
isolation (STI) region and extending between a source and a drain. The fin is formed from a …

Challenges for nanoscale MOSFETs and emerging nanoelectronics

YB Kim - transactions on electrical and electronic materials, 2010 - koreascience.kr
Complementary metal-oxide-semiconductor (CMOS) technology scaling has been a main
key for continuous progress in silicon-based semiconductor industry over the past three …

A Perspective View of Silicon Based Classical to Non-Classical MOS Transistors and their Extension in Machine Learning

AP Singh, VK Mishra, S Akhter - Silicon, 2023 - Springer
Unprecedented growth in CMOS technology and demand of high-density integrated circuits
(ICs) in semiconductor industry has motivated to research community towards the …

Strain-driven electronic band structure modulation of Si nanowires

KH Hong, J Kim, SH Lee, JK Shin - Nano letters, 2008 - ACS Publications
One of the major challenges toward Si nanowire (SiNW) based photonic devices is
controlling the electronic band structure of the Si nanowire to obtain a direct band gap. Here …

Charge separation via strain in silicon nanowires

Z Wu, JB Neaton, JC Grossman - Nano Letters, 2009 - ACS Publications
Axial charge separation in small diameter, partially strained silicon nanowires is predicted
from ab initio calculations with electrons and holes located in different ends of the wires. We …

Comprehensive study of the Raman shifts of strained silicon and germanium

CY Peng, CF Huang, YC Fu, YH Yang, CY Lai… - Journal of Applied …, 2009 - pubs.aip.org
Raman shifts are investigated on silicon and germanium substrates under the uniaxial
tensile strain on various substrate orientations. The strain splits the triply degenerate optical …

Performance assessment of nanoscale double-and triple-gate FinFETs

A Kranti, GA Armstrong - Semiconductor science and technology, 2006 - iopscience.iop.org
Based on 3D simulations, we report a performance assessment of triple-and double-gate
FinFETs for high performance (HP), low operating power (LOP) and low standby power …

Anisotropic lithium insertion behavior in silicon nanowires: binding energy, diffusion barrier, and strain effect

Q Zhang, Y Cui, E Wang - The Journal of Physical Chemistry C, 2011 - ACS Publications
Silicon nanowires (SiNWs) have recently been shown to be promising as high capacity
lithium battery anodes. SiNWs can be grown with their long axis along several different …

Thermoelectric properties of electrically gated bismuth telluride nanowires

I Bejenari, V Kantser, AA Balandin - Physical Review B—Condensed Matter …, 2010 - APS
We theoretically studied how the electric field effect can modify thermoelectric properties of
intrinsic, n-type and p-type bismuth telluride nanowires with the growth direction [110]. The …