This paper is a review of the remarkable progress that has been made during the past few
decades in design, modeling, and fabrication of micromachined resonators. Although micro …

With the introduction of the working principle of coupled resonators, the coupled bulk
acoustic wave (BAW) Micro-Electro-Mechanical System (MEMS) resonators have been …

An overview of microelectromechanical systems (MEMS) resonators for frequency reference
and timing applications is presented. The progress made in the past few decades in design …

Micromechanical resonators are promising replacements for quartz crystals for timing and
frequency references owing to potential for compactness, integrability with CMOS fabrication …

The stability of resonant frequency for single wafer, thin-film encapsulated silicon MEMS
resonators was investigated for both long-term operation and temperature cycling. The …

This paper reports on a new type of high-frequency mode-matched gyroscope with
significantly reduced dependencies on environmental stimuli such as temperature, vibration …

Over the past few years, microelectromechanical system (MEMS) based on-chip resonators
have shown significant potential for sensing and high frequency signal processing …

Vibrating polysilicon micromechanical ring resonators, using a unique extensional wine-
glass-mode shape to achieve lower impedance than previous UHF resonators, have been …

We report disk-shaped silicon optomechanical resonators with frequency up to 1.75 GHz in
the ultrahigh frequency band. Optical transduction of the thermal motion of the disks' in …

As excessive exposure to airborne particulate matter (PM) results in adverse health effects,
the development of real-time PM monitoring is highly relevant. The objective of this article is …