Physics of laser-driven tin plasma sources of EUV radiation for nanolithography
OO Versolato - Plasma Sources Science and Technology, 2019 - iopscience.iop.org
Laser-produced transient tin plasmas are the sources of extreme ultraviolet (EUV) light at
13.5 nm wavelength for next-generation nanolithography, enabling the continued …
13.5 nm wavelength for next-generation nanolithography, enabling the continued …
Microdroplet-tin plasma sources of EUV radiation driven by solid-state-lasers (Topical Review)
Plasma produced from molten-tin microdroplets generates extreme ultraviolet light for state-
of-the-art nanolithography. Currently, CO 2 lasers are used to drive the plasma. In the future …
of-the-art nanolithography. Currently, CO 2 lasers are used to drive the plasma. In the future …
Early-time hydrodynamic response of a tin droplet driven by laser-produced plasma
J Hernandez-Rueda, B Liu, DJ Hemminga… - Physical Review …, 2022 - APS
We experimentally and numerically investigate the early-time hydrodynamic response of tin
microdroplets driven by a ns-laser-induced plasma. Experimentally, we use stroboscopic …
microdroplets driven by a ns-laser-induced plasma. Experimentally, we use stroboscopic …
Characterization of angularly resolved EUV emission from 2-µm-wavelength laser-driven Sn plasmas using preformed liquid disk targets
The emission properties of tin plasmas, produced by the irradiation of preformed liquid tin
targets by several-ns-long 2 µm-wavelength laser pulses, are studied in the extreme …
targets by several-ns-long 2 µm-wavelength laser pulses, are studied in the extreme …
[HTML][HTML] Laser-induced shock inside a cylindrical water column
M Tang, M Sun, H Zhang, J Lu - Physics of Fluids, 2024 - pubs.aip.org
An investigation of laser-induced shock inside a water column is conducted. We focus on the
reflection of the shock by the circle interface and discuss the dynamics of the wavefront at …
reflection of the shock by the circle interface and discuss the dynamics of the wavefront at …
[HTML][HTML] The transition from short-to long-timescale pre-pulses: Laser-pulse impact on tin microdroplets
We experimentally study the interaction of intense laser pulses with metallic microdroplets
and the resulting deformation. Two main droplet deformation regimes have previously been …
and the resulting deformation. Two main droplet deformation regimes have previously been …
[HTML][HTML] Laser-induced vaporization of a stretching sheet of liquid tin
We experimentally study the mass distribution of a sheet of liquid tin formed by the impact of
a ns-laser pulse on a spherical microdroplet. The mass distribution is obtained using a low …
a ns-laser pulse on a spherical microdroplet. The mass distribution is obtained using a low …
Spectral characterization of an industrial EUV light source for nanolithography
The emission spectra from an industrial, droplet-based, laser-produced plasma, extreme
ultraviolet light source for nanolithography are here presented and analyzed. The …
ultraviolet light source for nanolithography are here presented and analyzed. The …
Energy-and charge-state-resolved spectrometry of tin laser-produced plasma using a retarding field energy analyzer
L Poirier, A Lassise, Y Mostafa, L Behnke… - Applied Physics B, 2022 - Springer
We present a method to obtain the individual charge-state-dependent kinetic-energy
distributions of tin ions emanating from a laser-produced plasma from their joint overlapping …
distributions of tin ions emanating from a laser-produced plasma from their joint overlapping …
Liquid Tin Droplet Generator in Laser-produced Plasma Extreme Ultraviolet Source: A Review
Q Sun, H Qi, X Wang, D Zuo - IEEE Transactions on …, 2024 - ieeexplore.ieee.org
The 13.5-nm extreme ultraviolet (EUV) light radiated by laser-produced tin droplet plasma is
successfully used in manufacturing integrated circuits with critical dimensions (CDs) below 7 …
successfully used in manufacturing integrated circuits with critical dimensions (CDs) below 7 …