Here we introduce the existing fabrication techniques, detection methods, and related
techniques for microfluidic sensing, with an emphasis on the detection techniques. A …

We report on a technology for the fabrication of hollow capillary optical leaky waveguides in
fused silica glass. The fabrication process is based on lithography, wet chemical etching and …

An overview of both experimental and theoretical studies of cell electrophoresis mobility
(EPM) over the past fifty years and the relevance of cell EPM measurement are presented …

For the fabrication of microelectromechanical system devices, deep trench etching of
borosilicate glass (Corning 7740) has been investigated using SF 6/Ar inductively coupled …

Biochip technology has emerged from the fusion of biotechnology and micro/nanofabrication
technology. Biochips enable us to realize revolutionary new bioanalysis systems that can …

In this study, the dry plasma-chemical etching process of monocrystalline SiO 2 (quartz) in a
fluoride-based (sulfur hexafluoride, SF 6) inductively coupled plasma (ICP) was …

To fabricate microlaboratories, commercially available silica glasses represent a good
alternative to the expensive quartz or fused silica substrates. Therefore, the authors have …

This review covers fundamental developments in column liquid chromatography (LC)
equipment and instrumentation for the period of January 2000 through December 2001. As …

In this note, we present our results from process development and characterization of
reactive ion etching (RIE) of fused silica using a single-coated soft masking layer (KMPR® …

In this paper, we present our recent investigations into the characteristics of the deep
reactive ion etching (DRIE) of quartz. Three different etching gas mixtures, namely SF 6/Ar …