A review of actuation and sensing mechanisms in MEMS-based sensor devices

AS Algamili, MHM Khir, JO Dennis, AY Ahmed… - Nanoscale research …, 2021 - Springer
Over the last couple of decades, the advancement in Microelectromechanical System
(MEMS) devices is highly demanded for integrating the economically miniaturized sensors …

Bistable structures for advanced functional systems

Y Cao, M Derakhshani, Y Fang… - Advanced Functional …, 2021 - Wiley Online Library
Bistable mechanical systems having two local minima of potential energy can rest in either
of the two stable equilibrium states in the absence of external loadings. A snap‐through …

Electrostatic pull-in instability in MEMS/NEMS: A review

WM Zhang, H Yan, ZK Peng, G Meng - Sensors and Actuators A: Physical, 2014 - Elsevier
Pull-in instability as an inherently nonlinear and crucial effect continues to become
increasingly important for the design of electrostatic MEMS and NEMS devices and ever …

Dynamic manipulation of nanomechanical resonators in the high-amplitude regime and non-volatile mechanical memory operation

M Bagheri, M Poot, M Li, WPH Pernice… - Nature …, 2011 - nature.com
The ability to control mechanical motion with optical forces has made it possible to cool
mechanical resonators to their quantum ground states. The same techniques can also be …

The dynamic behavior of MEMS arch resonators actuated electrically

HM Ouakad, MI Younis - International Journal of Non-Linear Mechanics, 2010 - Elsevier
In this paper, we investigate the dynamic behavior of clamped–clamped micromachined
arches when actuated by a small DC electrostatic load superimposed to an AC harmonic …

Nonlinear damping in a micromechanical oscillator

S Zaitsev, O Shtempluck, E Buks, O Gottlieb - Nonlinear Dynamics, 2012 - Springer
Nonlinear elastic effects play an important role in the dynamics of microelectromechanical
systems (MEMS). A Duffing oscillator is widely used as an archetypical model of mechanical …

Review on the modeling of electrostatic MEMS

WC Chuang, HL Lee, PZ Chang, YC Hu - Sensors, 2010 - mdpi.com
Electrostatic-driven microelectromechanical systems devices, in most cases, consist of
couplings of such energy domains as electromechanics, optical electricity, thermoelectricity …

A small-gap electrostatic micro-actuator for large deflections

H Conrad, H Schenk, B Kaiser, S Langa… - Nature …, 2015 - nature.com
Common quasi-static electrostatic micro actuators have significant limitations in deflection
due to electrode separation and unstable drive regions. State-of-the-art electrostatic …

In Situ Activation of Snap‐Through Instability in Multi‐Response Metamaterials through Multistable Topological Transformation

L Wu, D Pasini - Advanced Materials, 2023 - Wiley Online Library
Snap‐through instability has been widely leveraged in metamaterials to attain non‐
monotonic responses for a specific subset of applications where conventional monotonic …

Passive control of viscous flow via elastic snap-through

M Gomez, DE Moulton, D Vella - Physical review letters, 2017 - APS
We demonstrate the passive control of viscous flow in a channel by using an elastic arch
embedded in the flow. Depending on the fluid flux, the arch may “snap” between two states …