This work presents implementation of electro-thermally actuated MEMS resonators in a
standard CMOS process via addition of a few mask-less post-processing steps. The …

This work presents fabrication of thermal-piezoresistive nanoelectromechanical (NEM)
silicon disk resonators and their characterization as highly sensitive mass sensors. Forests …

Over the last few decades, various micro-electromechanical (MEMS) transducers utilizing
different actuation and sensing mechanisms have been demonstrated and many of them …

This paper reports on fabrication of nano mechanical disk resonators on micro-thick
membranes and characterization of their resonance frequency shift due to air-pressure …

M/NEMS resonant sensors, due to their small size, consumption and quasi-digital output (a
frequency most of the time) are useful tools for on-board systems, from smartphones to …

Les capteurs M/NEMS résonants, grâce à leur petite taille, faible consommation, et caractère
quasi-numérique (leur grandeur de sortie est une fréquence la plupart du temps), sont des …

Le développement de nouvelles technologies, tant dans le domaine de l'électronique grand
public (smartphones, internet des objets,...) que dans le domaine automobile (véhicule …