Helium ion microcopy based on gas field ion sources represents a new ultrahigh resolution
microscopy and nanofabrication technique. It is an enabling technology that not only …

The helium ion microscope (HIM) has emerged as an instrument of choice for patterning,
imaging and, more recently, analytics at the nanoscale. Here, we review secondary electron …

The focused ion beam (FIB) is a powerful tool for fabrication, modification, and
characterization of materials down to the nanoscale. Starting with the gallium FIB, which was …

This paper is a review on the combination between Helium Ion Microscopy (HIM) and
Secondary Ion Mass Spectrometry (SIMS), which is a recently developed technique that is of …

A detection system based on a microchannel plate with a delay line readout structure has
been developed to perform scanning transmission ion microscopy (STIM) in the helium ion …

Abstract Secondary Ion Mass Spectrometry (SIMS) is an extremely powerful technique for
analysing surfaces, owing in particular to its excellent sensitivity, high dynamic range, very …

Helium ion microscopy has been used to investigate the ionoluminescence of NaCl. A 35
keV, sub-nanometer He+ ion beam was used to generate ionoluminescence. The interaction …

Helium ion microscopy has been employed to investigate the ionoluminescence of various
semiconductors. We have verified the possibility of application of this technique for high …

The helium ion microscope provides a sub-nanometer size He+ ion beam which can be
employed for materials modification. We demonstrate how material properties can be tuned …

The helium ion microscope (HIM), as the name implies, is primarily an imaging tool. This
chapter serves as an introduction to imaging with the HIM and explores the various ways this …