[HTML][HTML] Recent development and futuristic applications of MEMS based piezoelectric microphones
This paper presents a comprehensive literature survey of MEMS based piezoelectric
microphones along with the fabrication processes involved, application domains, and …
microphones along with the fabrication processes involved, application domains, and …
Design, fabrication and reliability study of piezoelectric ZnO based structure for development of MEMS acoustic sensor
This paper reports a piezoelectric zinc oxide (ZnO) based acoustic sensor for high sound
pressure level (SPL) with wide bandwidth for audio and aeroacoustic applications. The …
pressure level (SPL) with wide bandwidth for audio and aeroacoustic applications. The …
Theoretical and numerical investigation of a new 3-axis SU-8 MEMS piezoresistive accelerometer
This paper investigates the static and dynamic performances of a new enhanced design of 3-
axis MEMS polymer piezoresistive accelerometer. Its key geometric parameters are …
axis MEMS polymer piezoresistive accelerometer. Its key geometric parameters are …
Induced-stress analysis of SU-8 polymer based single mass 3-axis piezoresistive MEMS accelerometer
This paper presents the induced-stress analysis of an SU-8 polymer based 3-axis
piezoresistive MEMS accelerometer having a single proof mass along with proposed …
piezoresistive MEMS accelerometer having a single proof mass along with proposed …
Design Enhancement of Folded Beams Attachment for MEMS-Based Triaxial Accelerometer
F Khayat, D Nasr, MH Said, M Mansour… - … on Design, Test and …, 2024 - ieeexplore.ieee.org
This work presents a study through simulations of an improved MEMS-based triaxial
piezoelectric accelerometer. The starting structure of the sensor consists of a seismic mass …
piezoelectric accelerometer. The starting structure of the sensor consists of a seismic mass …
Dynamic behaviour and piezoresistive analysis of a single mass 3-axis polymer MEMS accelerometer
In this work, for the first-time dynamic behavior of an SU-8 polymer based single proof mass,
3-axis MEMS piezoresistive accelerometer is presented. The beams dimensions were …
3-axis MEMS piezoresistive accelerometer is presented. The beams dimensions were …