The 2017 Plasma Roadmap: Low temperature plasma science and technology
Abstract Journal of Physics D: Applied Physics published the first Plasma Roadmap in 2012
consisting of the individual perspectives of 16 leading experts in the various sub-fields of low …
consisting of the individual perspectives of 16 leading experts in the various sub-fields of low …
Approaches to inactivating aflatoxins—a review and challenges
According to the World Health Organization, the contamination of crops with aflatoxins poses
a significant economic burden, estimated to affect 25% of global food crops. In the event that …
a significant economic burden, estimated to affect 25% of global food crops. In the event that …
Advanced fluid modeling and PIC/MCC simulations of low-pressure ccrf discharges
Comparative studies of capacitively coupled radio-frequency discharges in helium and
argon at pressures between 10 and 80 Pa are presented applying two different fluid …
argon at pressures between 10 and 80 Pa are presented applying two different fluid …
Modeling of very high frequency large-electrode capacitively coupled plasmas with a fully electromagnetic particle-in-cell code
D Eremin, E Kemaneci, M Matsukuma… - Plasma Sources …, 2023 - iopscience.iop.org
Phenomena taking place in capacitively coupled plasmas with large electrodes and driven
at very high frequencies are studied numerically utilizing a novel energy-and charge …
at very high frequencies are studied numerically utilizing a novel energy-and charge …
2D particle-in-cell simulations of charged particle dynamics in geometrically asymmetric low pressure capacitive RF plasmas
Understanding the spatio-temporal dynamics of charged particles in low pressure radio
frequency capacitively coupled plasmas (CCP) is the basis for knowledge based process …
frequency capacitively coupled plasmas (CCP) is the basis for knowledge based process …
Plasma non-uniformity in a symmetric radiofrequency capacitively-coupled reactor with dielectric side-wall: a two dimensional particle-in-cell/Monte Carlo collision …
A Cartesian-coordinate two-dimensional electrostatic particle-in-cell/Monte Carlo collision
(PIC/MCC) plasma simulation code is presented, including a new treatment of charge …
(PIC/MCC) plasma simulation code is presented, including a new treatment of charge …
Investigation of dual-frequency effect on the ion energy and flux in Torr-regime plasma by a two-dimensional GPU-PIC simulation
CH Kim, JS Kim, MY Hur, Y Sakiyama… - … Sources Science and …, 2021 - iopscience.iop.org
Dual frequency (DF) capacitively coupled plasma (CCP) equipment has been widely used in
semiconductor processing and requires particle-in-cell (PIC) simulations to investigate the …
semiconductor processing and requires particle-in-cell (PIC) simulations to investigate the …
Control of the ion flux and energy distribution of dual-frequency capacitive RF plasmas by the variation of the driving voltages
HH Kim, JH Shin, HJ Lee - Journal of Vacuum Science & Technology A, 2023 - pubs.aip.org
Due to its advantages of spatial uniformity and ion energy control, a dual-frequency (DF)
capacitive-coupled plasma is widely used in semiconductor etching and deposition …
capacitive-coupled plasma is widely used in semiconductor etching and deposition …
[HTML][HTML] A nonlinear electromagnetics model of an asymmetrically-driven, low pressure capacitive discharge
DQ Wen, E Kawamura, MA Lieberman… - Physics of …, 2017 - pubs.aip.org
It is well-known that standing waves having radially center-high voltage profiles exist in high
frequency driven capacitive discharges. Capacitive sheaths can also nonlinearly excite …
frequency driven capacitive discharges. Capacitive sheaths can also nonlinearly excite …
The formation mechanism of nonuniformity from 2D nonlocal particle-dynamics in capacitive RF discharges
CH Kim, H Kim, G Park, HJ Lee - Plasma Sources Science and …, 2021 - iopscience.iop.org
Kinetic effects and nonlinear characteristics caused by multi-dimensional effects in
capacitively coupled plasma (CCP) devices are reported using particle-in-cell (PIC) Monte …
capacitively coupled plasma (CCP) devices are reported using particle-in-cell (PIC) Monte …