This paper is an overview of current gyroscopes and their roles based on their applications.
The considered gyroscopes include mechanical gyroscopes and optical gyroscopes at …

Silicon-based microelectromechanical systems (MEMS) inertial sensors have become
ubiquitous, revolutionizing motion sensing, vibration sensing and accurate positioning in …

This paper presents a review of silicon micromachined accelerometers and gyroscopes.
Following a brief introduction to their operating principles and specifications, various device …

MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental
operational principles of micromachined vibratory rate gyroscopes, and introduces structural …

This paper describes a three-axis accelerometer implemented in a surface-micromachining
technology with integrated CMOS. The accelerometer measures changes in a capacitive …

This book on mechanical microsensors is based on a course organized by the Swiss
Foundation for Research in Microtechnology (FSRM) in Neuchatel, Swit zerland, and …

Micro-electromechenical Systems (MEMS) gyroscope is widely used in many occasions to
measure the angular speed of the moving objects and attracts the attentions of many …

It is challenging at best to find a resource that provides the breadth of information necessary
to develop a successful micro electro mechanical system (MEMS) design. Micro Electro …

This paper presents experimental data about the sources of the quadrature error in a fully
decoupled microelectromechanical systems gyroscope and demonstrates the extent of …

In this paper, issues related to the zero-rate output (ZRO) of a vibratory microgyroscope are
studied. Different sources of the ZRO are discussed and how the effect of each source can …