Chemical vapor deposition single‐crystal diamond: a review

JC Arnault, S Saada… - physica status solidi (RRL) …, 2022 - Wiley Online Library
With its outstanding physical properties, single‐crystal diamond is the material of choice for
future power electronics and quantum devices. The later application field is based on the …

Two extreme crystal size scales of diamonds, large single crystal and nanocrystal diamonds: Synthesis, properties and their mutual transformation

Y Wang, W Wang, S Yang, G Shu, B Dai, J Zhu - New Carbon Materials, 2021 - Elsevier
Diamonds with two extreme sizes, large single crystal and nanocrystalline, have completely
different properties, and have aroused the continuous attention of researchers. Each has its …

Single crystal diamond growth by MPCVD at subatmospheric pressures

AP Bolshakov, VG Ralchenko, G Shu, B Dai… - Materials Today …, 2020 - Elsevier
Microwave plasma assisted chemical vapor deposition (MPCVD) is the established
technique to produce high quality single crystal diamond (SCD). While typical pressures for …

Enhanced deposition rate of polycrystalline CVD diamond at high microwave power densities

AP Bolshakov, VG Ralchenko, VY Yurov, G Shu… - Diamond and Related …, 2019 - Elsevier
We report on growth of polycrystalline diamond (PCD) by chemical vapor deposition (CVD)
in a microwave plasma reactor under high absorbed microwave power density (MWPD) and …

Investigation of homoepitaxial growth by microwave plasma CVD providing high growth rate and high quality of diamond simultaneously

AL Vikharev, MA Lobaev, AM Gorbachev… - Materials Today …, 2020 - Elsevier
Single crystal diamond (SCD) growth on (100)-oriented high-pressure high-temperature
(HPHT) type 2a diamond substrate was investigated to optimize growth conditions providing …

Effect of boron doping levels on the microstructure and characteristics of high-quality boron-doped diamond electrodes prepared by MPCVD

Y Gong, W Jia, B Zhou, K Zheng, D Ma, Z Li… - Diamond and Related …, 2023 - Elsevier
In order to fully understand the relationship between boron doping level and material
characteristics, a series of high-quality boron-doped diamond (BDD) electrodes with …

Growth of single-crystal diamond by microwave plasma CVD with high precursor utilization using cyclic gas injection and control of carbonaceous species content with …

Y Li, B Dai, VG Ralchenko, J Lyu, X Hao, J Zhao… - Vacuum, 2022 - Elsevier
Single-crystal diamond was synthesized in a microwave plasma assisted chemical vapor
deposition system with periodical injection of methane/hydrogen mixture in a closed reaction …

[PDF][PDF] MPCVD 单晶金刚石高速率和高品质生长研究进展

李一村, 郝晓斌, 代兵, 舒国阳, 赵继文, 张森… - 人工晶体 …, 2020 - researching.cn
微波等离子体化学气相沉积(MPCVD) 技术被认为是制备大尺寸高品质单晶金刚石的理想手段之
一. 然而其较低的生长速率(~ 10 μm/h) 以及较高的缺陷密度(10 3~ 107 cm-2) 是阻碍MPCVD …

Imaging and Modeling C2 Radical Emissions from Microwave Plasma-Activated Methane/Hydrogen Gas Mixtures: Contributions from Chemiluminescent Reactions …

JPP Gore, EJD Mahoney, JA Smith… - The Journal of …, 2021 - ACS Publications
Wavelength and spatially resolved imaging and 2D plasma chemical modeling methods
have been used to study the emission from electronically excited C2 radicals in microwave …

[HTML][HTML] Surface morphology of the interface junction of CVD mosaic single-crystal diamond

X Wang, P Duan, Z Cao, C Liu, D Wang, Y Peng, X Xu… - Materials, 2019 - mdpi.com
The diamond mosaic grown on the single-crystal diamond substrates by the microwave
plasma chemical vapor deposition (MPCVD) method has been studied. The average growth …