Since two decades piezoelectric MEMS resonator research has been making a headway by
leaps and bounds in multiple fronts such as micro/nanofabrication techniques, device and …

Over the last two decades, piezoelectric resonant sensors based on micro-
electromechanical systems (MEMS) technologies have been extensively studied as such …

This paper demonstrates super high frequency (SHF) Lamb and surface acoustic wave
resonators based on single-crystal orientation Aluminum Scandium Nitride (AlScN) thin films …

This paper proposes a reem-shaped phononic crystal for the performance enhancement of
TPoS resonators. The proposed phononic crystal offers an ultra-wide acoustic band gap that …

In this letter, we report a highly temperature-stable and low impedance scandium doped
aluminum nitride (Sc x AI 1-x N,%) on silicon piezoelectric microelectromechanical system …

This article presents a new design of supporting tethers through the concept of force
distribution. The transmitted force applied on tethers will be distributed on the new tether …

Phononic crystals/metamaterials are attracting increasing interest because of their large
variety of applications at both the macro and micro scales. In this work, a new metamaterial …

Over the past several decades, the technology of micro-electromechanical system (MEMS)
has advanced. A clear need of miniaturization and integration of electronics components …

This paper reports experimental results demonstrating the use of biconvex-edge designs to
enhance the quality factor (Q) in aluminum nitride (AlN)-on-silicon micromechanical …

This work presents a novel ultra-high frequency Lamb mode Aluminum nitride piezoelectric
resonator with enhanced quality factors (Q). With slots introduced in the vicinity of the tether …