Monolithic single phase cubic (c) Ti1− xAlxN thin films are used in various industrial
applications due to their high thermal stability, which beneficially effects lifetime and …

Infrared (IR) radiation detectors are used in numerous applications from thermal imaging to
spectroscopic gas sensing. Obtaining high speed and sensitivity, low-power operation, and …

While many research activities concentrate on mechanical properties and thermal stabilities
of protective thin films, only little is known about their thermal properties being essential for …

CMOS compatibility and 8-inch manufacturability have been highly desired in MEMS
technology. In this article, we demonstrate a MEMS pyroelectric IR detector using CMOS …

The emergent ferroelectricity in HfO 2-based systems has attracted significant attention as
this simple binary high-k dielectric now offers the possibility of nonvolatile function. In this …

TiN x films were deposited on glass substrates by DC reactive magnetron sputtering
technique. The influence of N 2 flow rates (1, 2, 4, and 20 sccm) on the structure, resistivity …

The effects of 100 keV Ar 2+ ion irradiation on the structure and stability of multilayered dc
sputtered and annealed thin films of (Ti, Al) N/Ti 2 AlN x have been investigated with X-ray …

The recent co-optimization of memristive technologies and programming algorithms enabled
neural networks training with in-memory computing systems. In this context, novel analog …

Ruthenium may replace copper interconnects in next-generation very-large-scale
integration (VLSI) circuits. However, interfacial bonding between Ru interconnect wires and …

Titanium nitride (TiN) is a candidate material for several plasmonic applications, and pulsed
laser ablation in liquids (PLAL) represents a rapid, scalable, and environmentally friendly …