This paper is a review of the remarkable progress that has been made during the past few
decades in design, modeling, and fabrication of micromachined resonators. Although micro …

1. INTRODUCTION Holographic sensors are analytical devices that systematically diffract
narrow-band light in the ultraviolet to near-infrared range for application in the detection and …

The most important milestone in the field of magnetic sensors was when AMR sensors
started to replace Hall sensors in many applications where the greater sensitivity of AMRs …

Microelectromechanical systems (MEMS) technology allows the integration of magnetic field
sensors with electronic components, which presents important advantages such as small …

A low-power microelectromechanical-systems (MEMS) three-axis Lorentz-force magnetic
sensor is presented. The sensor detects magnetic field in two axes with a single MEMS …

Microelectromechanical systems (MEMS) resonators have allowed the development of
magnetic field sensors with potential applications such as biomedicine, automotive industry …

We experimentally demonstrate a miniature highly sensitive wide-range resonant magnetic
Lorentz-force micro-sensor. The concept is demonstrated based on the detection of the …

Emerging quantum technologies, such as quantum computations and precise sensing,
provide new opportunities in the fields of science and engineering. While energy …

This paper describes a microelectromechanical systems (MEMS) Lorentz force navigation
magnetometer whose fabrication is fully compatible with existing foundry processes used to …

A Lorentz force based resonant MEMS magnetic-field sensor with optical readout has been
demonstrated. The sensor employs a micromachined resonant mirror that is excited by the …