S Ogawa, M Okabe, T Itoh, N Yoshida, S Nonomura - Thin Solid Films, 2008 - Elsevier
B-doped hydrogenated amorphous silicon carbon (a-Si1− xCx: H) films have been prepared
by hot-wire CVD (HWCVD) using SiH3CH3 as the carbon source gas. The optical bandgap …