D Gall, CS Shin, T Spila, M Odén, MJH Senna… - Journal of Applied …, 2002 - pubs.aip.org
CrN layers, 0.5 μm thick, were grown on MgO (001) at T s= 570–775° C by ultrahigh vacuum
magnetically unbalanced magnetron sputter deposition in pure N 2 discharges at 20 mTorr …