Electrostatic pull-in instability in MEMS/NEMS: A review
WM Zhang, H Yan, ZK Peng, G Meng - Sensors and Actuators A: Physical, 2014 - Elsevier
Pull-in instability as an inherently nonlinear and crucial effect continues to become
increasingly important for the design of electrostatic MEMS and NEMS devices and ever …
increasingly important for the design of electrostatic MEMS and NEMS devices and ever …
Spatial modulation of nonlinear flexural vibrations of membrane resonators
We study the vibrational motion of mechanical resonators under strong drive in the strongly
nonlinear regime. By imaging the vibrational state of rectangular silicon nitride membrane …
nonlinear regime. By imaging the vibrational state of rectangular silicon nitride membrane …
Concentric split aluminum with silicon-aluminum nitride annular rings resonators
This paper presents a novel approach of annular concentric split rings
microelectromechanical resonators with tether configuration to reduce anchor loss and gives …
microelectromechanical resonators with tether configuration to reduce anchor loss and gives …
[图书][B] Studying Energy Loss Mechanisms in MEMS Based Contour-Mode Resonators Using Laser Doppler Vibrometery
BA Gibson - 2016 - search.proquest.com
The work in this thesis aims to uncover energy loss mechanisms in MEMS-based
piezoelectric contour-mode resonators. Quality factors for these devices has been …
piezoelectric contour-mode resonators. Quality factors for these devices has been …