The development of micromachined gyroscope structure and circuitry technology

D Xia, C Yu, L Kong - Sensors, 2014 - mdpi.com
This review surveys micromachined gyroscope structure and circuitry technology. The
principle of micromachined gyroscopes is first introduced. Then, different kinds of MEMS …

Concepts, roadmaps and challenges of ovenized MEMS gyroscopes: A review

Y Wang, R Cao, C Li, RN Dean - IEEE sensors journal, 2020 - ieeexplore.ieee.org
The MEMS gyroscope by means of oven control, or the so-called ovenized MEMS
gyroscope, isolates the die from the external environment and utilizes a closed-loop …

Quadrature-error compensation and corresponding effects on the performance of fully decoupled MEMS gyroscopes

E Tatar, SE Alper, T Akin - Journal of Microelectromechanical …, 2012 - ieeexplore.ieee.org
This paper presents experimental data about the sources of the quadrature error in a fully
decoupled microelectromechanical systems gyroscope and demonstrates the extent of …

The attitude control of fixed-wing MAVS in turbulent environments

A Mohamed, K Massey, S Watkins, R Clothier - Progress in Aerospace …, 2014 - Elsevier
The small scale and portability of fixed-wing Micro Aerial Vehicles lend them to many unique
applications, however their utility is often limited by ineffective attitude control in turbulent …

Fixed-wing MAV attitude stability in atmospheric turbulence—Part 2: Investigating biologically-inspired sensors

A Mohamed, S Watkins, R Clothier… - Progress in Aerospace …, 2014 - Elsevier
Challenges associated with flight control of agile fixed-wing Micro Air Vehicles (MAVs)
operating in complex environments is significantly different to any larger scale vehicle. The …

A closed-loop digitally controlled MEMS gyroscope with unconstrained sigma-delta force-feedback

J Raman, E Cretu, P Rombouts… - IEEE Sensors …, 2009 - ieeexplore.ieee.org
In this paper, we describe the system architecture and prototype measurements of a MEMS
gyroscope system with a resolution of 0.025 ^∘/s/\rmHz. The architecture makes extensive …

A sub-0.1°/h bias-instability split-mode MEMS gyroscope with CMOS readout circuit

Y Zhao, J Zhao, X Wang, GM Xia, Q Shi… - IEEE Journal of Solid …, 2018 - ieeexplore.ieee.org
This paper describes a split-mode tuning fork MEMS gyroscope with CMOS readout circuit.
The gyroscope achieves 0.008°/angle random walk (ARW) and 0.08°/h bias instability (BI) …

Sensing mode coupling analysis for dual-mass MEMS gyroscope and bandwidth expansion within wide-temperature range

H Cao, H Li, X Shao, Z Liu, Z Kou, Y Shan, Y Shi… - … Systems and Signal …, 2018 - Elsevier
This paper presents the bandwidth expanding method with wide-temperature range for
sense mode coupling dual-mass MEMS gyro. The real sensing mode of the gyroscope is …

Origins and mechanisms of bias instability noise in a three-axis mode-matched MEMS gyroscope

T Hiller, Z Pentek, JT Liewald… - Journal of …, 2019 - ieeexplore.ieee.org
In this paper, we examine the origins of bias instability in three-axis, mode-matched MEMS
gyroscopes. Reducing this drift phenomenon is crucial for highly accurate navigation in …

Thermoelastic damping in MEMS gyroscopes at high frequencies

D Schiwietz, EM Weig… - Microsystems & …, 2023 - nature.com
Microelectromechanical systems (MEMS) gyroscopes are widely used, eg, in modern
automotive and consumer applications, and require signal stability and accuracy in rather …