Tailored-waveform excitation of capacitively coupled plasmas and the electrical asymmetry effect
T Lafleur - Plasma Sources Science and Technology, 2015 - iopscience.iop.org
Unequal areas of the powered and grounded electrodes in single-frequency capacitively
coupled plasmas (CCPs) are well-known to generate a DC self-bias voltage and an …
coupled plasmas (CCPs) are well-known to generate a DC self-bias voltage and an …
Electron power absorption dynamics in capacitive radio frequency discharges driven by tailored voltage waveforms in CF4
S Brandt, B Berger, E Schüngel, I Korolov… - Plasma Sources …, 2016 - iopscience.iop.org
The power absorption dynamics of electrons and the electrical asymmetry effect in
capacitive radio-frequency plasmas operated in CF 4 and driven by tailored voltage …
capacitive radio-frequency plasmas operated in CF 4 and driven by tailored voltage …
Effects of structured electrodes on electron power absorption and plasma uniformity in capacitive RF discharges
The electron power absorption dynamics and plasma uniformity in low pressure capacitively
coupled RF discharges with structured electrodes are investigated by graphics processing …
coupled RF discharges with structured electrodes are investigated by graphics processing …
Chemical kinetics and density measurements of OH in an atmospheric pressure He+ O2+ H2O radiofrequency plasma
A Brisset, AR Gibson, S Schröter, K Niemi… - Journal of Physics D …, 2021 - iopscience.iop.org
This work presents experiments and modelling of OH densities in a radio-frequency driven
atmospheric-pressure plasma in a plane-parallel geometry, operated in helium with small …
atmospheric-pressure plasma in a plane-parallel geometry, operated in helium with small …
High frequency sheath modulation and higher harmonic generation in a low pressure very high frequency capacitively coupled plasma excited by sawtooth waveform
A particle-in-cell simulation study is performed to investigate the discharge asymmetry,
higher harmonic generations and electron heating mechanism in a low pressure …
higher harmonic generations and electron heating mechanism in a low pressure …
Effect of gas properties on the dynamics of the electrical slope asymmetry effect in capacitive plasmas: comparison of Ar, H2 and CF4
Tailored voltage excitation waveforms provide an efficient control of the ion energy (through
the electrical asymmetry effect) in capacitive plasmas by varying the'amplitude'asymmetry of …
the electrical asymmetry effect) in capacitive plasmas by varying the'amplitude'asymmetry of …
Ion energy and angular distributions in low-pressure capacitive oxygen RF discharges driven by tailored voltage waveforms
We investigate the energy and angular distributions of ions reaching the electrodes in low-
pressure, capacitively coupled oxygen radio-frequency discharges. These distributions, as …
pressure, capacitively coupled oxygen radio-frequency discharges. These distributions, as …
Atmospheric-pressure diffuse dielectric barrier discharges in Ar/O2 gas mixture using 200 kHz/13.56 MHz dual frequency excitation
Y Liu, SA Starostin, FJJ Peeters… - Journal of Physics D …, 2018 - iopscience.iop.org
Atmospheric-pressure diffuse dielectric barrier discharges (DBDs) were obtained in Ar/O 2
gas mixture using dual-frequency (DF) excitation at 200 kHz low frequency (LF) and 13.56 …
gas mixture using dual-frequency (DF) excitation at 200 kHz low frequency (LF) and 13.56 …
Optical emission intensity overshoot and electron heating mechanisms during the re-ignition of pulsed capacitively coupled Ar plasmas
K Hernandez, A Press, MJ Goeckner… - Journal of Vacuum …, 2021 - pubs.aip.org
Phase resolved optical emission spectroscopy (PROES) measurements were combined with
measurements of the optical emission intensity (OEI) and electrical characteristics (RF …
measurements of the optical emission intensity (OEI) and electrical characteristics (RF …
Decoupling ion energy and flux in intermediate pressure capacitively coupled plasmas via tailored voltage waveforms
The discrete control of ion energy and flux is of increasing importance to industrially relevant
plasma sources. The ion energy distribution functions (IEDFs) and net ion flux incident upon …
plasma sources. The ion energy distribution functions (IEDFs) and net ion flux incident upon …