Tailored-waveform excitation of capacitively coupled plasmas and the electrical asymmetry effect

T Lafleur - Plasma Sources Science and Technology, 2015 - iopscience.iop.org
Unequal areas of the powered and grounded electrodes in single-frequency capacitively
coupled plasmas (CCPs) are well-known to generate a DC self-bias voltage and an …

Electron power absorption dynamics in capacitive radio frequency discharges driven by tailored voltage waveforms in CF4

S Brandt, B Berger, E Schüngel, I Korolov… - Plasma Sources …, 2016 - iopscience.iop.org
The power absorption dynamics of electrons and the electrical asymmetry effect in
capacitive radio-frequency plasmas operated in CF 4 and driven by tailored voltage …

Effects of structured electrodes on electron power absorption and plasma uniformity in capacitive RF discharges

L Wang, P Hartmann, Z Donkó, YH Song… - Journal of Vacuum …, 2021 - pubs.aip.org
The electron power absorption dynamics and plasma uniformity in low pressure capacitively
coupled RF discharges with structured electrodes are investigated by graphics processing …

Chemical kinetics and density measurements of OH in an atmospheric pressure He+ O2+ H2O radiofrequency plasma

A Brisset, AR Gibson, S Schröter, K Niemi… - Journal of Physics D …, 2021 - iopscience.iop.org
This work presents experiments and modelling of OH densities in a radio-frequency driven
atmospheric-pressure plasma in a plane-parallel geometry, operated in helium with small …

High frequency sheath modulation and higher harmonic generation in a low pressure very high frequency capacitively coupled plasma excited by sawtooth waveform

S Sharma, N Sirse, MM Turner - Plasma Sources Science and …, 2020 - iopscience.iop.org
A particle-in-cell simulation study is performed to investigate the discharge asymmetry,
higher harmonic generations and electron heating mechanism in a low pressure …

Effect of gas properties on the dynamics of the electrical slope asymmetry effect in capacitive plasmas: comparison of Ar, H2 and CF4

B Bruneau, T Lafleur, T Gans… - Plasma Sources …, 2015 - iopscience.iop.org
Tailored voltage excitation waveforms provide an efficient control of the ion energy (through
the electrical asymmetry effect) in capacitive plasmas by varying the'amplitude'asymmetry of …

Ion energy and angular distributions in low-pressure capacitive oxygen RF discharges driven by tailored voltage waveforms

Z Donkó, A Derzsi, M Vass, J Schulze… - Plasma Sources …, 2018 - iopscience.iop.org
We investigate the energy and angular distributions of ions reaching the electrodes in low-
pressure, capacitively coupled oxygen radio-frequency discharges. These distributions, as …

Atmospheric-pressure diffuse dielectric barrier discharges in Ar/O2 gas mixture using 200 kHz/13.56 MHz dual frequency excitation

Y Liu, SA Starostin, FJJ Peeters… - Journal of Physics D …, 2018 - iopscience.iop.org
Atmospheric-pressure diffuse dielectric barrier discharges (DBDs) were obtained in Ar/O 2
gas mixture using dual-frequency (DF) excitation at 200 kHz low frequency (LF) and 13.56 …

Optical emission intensity overshoot and electron heating mechanisms during the re-ignition of pulsed capacitively coupled Ar plasmas

K Hernandez, A Press, MJ Goeckner… - Journal of Vacuum …, 2021 - pubs.aip.org
Phase resolved optical emission spectroscopy (PROES) measurements were combined with
measurements of the optical emission intensity (OEI) and electrical characteristics (RF …

Decoupling ion energy and flux in intermediate pressure capacitively coupled plasmas via tailored voltage waveforms

SJ Doyle, AR Gibson, RW Boswell… - Plasma Sources …, 2020 - iopscience.iop.org
The discrete control of ion energy and flux is of increasing importance to industrially relevant
plasma sources. The ion energy distribution functions (IEDFs) and net ion flux incident upon …