This paper studies vehicle management in unified Automated Material Handling Systems
(AMHS) of semiconductor manufacturing facilities. The main characteristics of an AMHS are …

In multi-floor fabrication facilities (fabs), lifters' efficient transportation of resources is crucial
for the overall productivity of the modern semiconductor industry. Unfortunately, most of the …

This research uses a case study methodology to investigate ways of improving the outgoing
quality assurance (OQA) processes of a 12-inch wafer foundry. It applies the value stream …

This paper proposes a deep reinforcement learning-based lifter assignment algorithm
utilising Deep Q-network (DQN) to minimise the total inter-floor delivery time in …

Automated material handling systems (AMHS) aim to supply wafers to the right place at the
right time in semiconductor fab. Appropriate management in response to the changing …

Abstract Job Shop Scheduling with Material Handling has attracted increasing attention in
both industry and academia, especially with the inception of Industry 4.0 and smart …

摘要(中) 隨著科技的演變, 搭配有顯示器的消費性電子產品, 其顯示器擁有高畫素的產品品質,
逐漸被認為是必須品質. 所以市場上, 從傳統的電視和螢幕顯示器, 到可動的手機或平板電腦 …

As semiconductor processes continue to be complex and the number of production steps is
increased, a single floor line often comes to have not enough capacity to cover such …

As semiconductor device geometries continue to shrink, the semiconductor manufacturing
process becomes increasingly complex. This usually results in unbalanced utilization of …

An assignment problem is a tool that helps in the decision-making process of resource
allocation. Every resource allocated to each job has a certain cost or payoff. Assignment …