G Gattere, C Valzasina, E Duqi - US Patent 12,050,102, 2024 - Google Patents
A button device includes a MEMS sensor having a MEMS strain detection structure and a deformable substrate configured to undergo deformation under the action of an external …
A Tocchio, F Rizzini, C Valzasina… - US Patent …, 2020 - Google Patents
The accelerometric sensor has a suspended region, mobile with respect to a supporting structure, and a sensing assem bly coupled to the suspended region and configured to …
T Takizawa - US Patent 11,187,529, 2021 - Google Patents
A gyro sensor includes a substrate, a fixed section fixed to the substrate, a driving section configured to perform driving along an X axis parallel to a principal plane of the substrate, a …
T Takizawa - US Patent 11,953,324, 2024 - Google Patents
A gyro sensor includes a substrate, a fixed section fixed to the substrate, a driving section configured to perform driving along an X axis parallel to a principal plane of the substrate, a …
T Takizawa - US Patent 11,754,396, 2023 - Google Patents
A gyro sensor includes a substrate, a fixed section fixed to the substrate, a driving section configured to perform driving along an X axis parallel to a principal plane of the substrate, a …
SH Tseng, SW Lee, CS Wang - US Patent 11,614,327, 2023 - Google Patents
US11614327B2 - Gyroscope structure - Google Patents US11614327B2 - Gyroscope structure - Google Patents Gyroscope structure Download PDF Info Publication number US11614327B2 …
A Tocchio, F Rizzini, C Valzasina… - US Patent …, 2022 - Google Patents
The accelerometric sensor has a suspended region, mobile with respect to a supporting structure, and a sensing assem bly coupled to the suspended region and configured to …