Triaxial micro-electromechanical gyroscope
T Zhang - US Patent 10,330,471, 2019 - Google Patents
The present invention is related to a triaxial micro-electromechanical gyroscope, comprising:
a ring-shaped detection capacitor located at the center; two sets of driving capacitors located …
a ring-shaped detection capacitor located at the center; two sets of driving capacitors located …
Waterproof MEMS button device, input device comprising the MEMS button device and electronic apparatus
G Gattere, C Valzasina, E Duqi - US Patent 12,050,102, 2024 - Google Patents
A button device includes a MEMS sensor having a MEMS strain detection structure and a
deformable substrate configured to undergo deformation under the action of an external …
deformable substrate configured to undergo deformation under the action of an external …
Accelerometric sensor in MEMS technology having high accuracy and low sensitivity to temperature and ageing
A Tocchio, F Rizzini, C Valzasina… - US Patent …, 2020 - Google Patents
The accelerometric sensor has a suspended region, mobile with respect to a supporting
structure, and a sensing assem bly coupled to the suspended region and configured to …
structure, and a sensing assem bly coupled to the suspended region and configured to …
Gyro sensor, electronic device, and vehicle
T Takizawa - US Patent 11,187,529, 2021 - Google Patents
A gyro sensor includes a substrate, a fixed section fixed to the substrate, a driving section
configured to perform driving along an X axis parallel to a principal plane of the substrate, a …
configured to perform driving along an X axis parallel to a principal plane of the substrate, a …
Gyro sensor, electronic device, and vehicle
T Takizawa - US Patent 11,953,324, 2024 - Google Patents
A gyro sensor includes a substrate, a fixed section fixed to the substrate, a driving section
configured to perform driving along an X axis parallel to a principal plane of the substrate, a …
configured to perform driving along an X axis parallel to a principal plane of the substrate, a …
Gyro sensor, electronic device, and vehicle
T Takizawa - US Patent 11,754,396, 2023 - Google Patents
A gyro sensor includes a substrate, a fixed section fixed to the substrate, a driving section
configured to perform driving along an X axis parallel to a principal plane of the substrate, a …
configured to perform driving along an X axis parallel to a principal plane of the substrate, a …
Gyroscope structure
SH Tseng, SW Lee, CS Wang - US Patent 11,614,327, 2023 - Google Patents
US11614327B2 - Gyroscope structure - Google Patents US11614327B2 - Gyroscope structure
- Google Patents Gyroscope structure Download PDF Info Publication number US11614327B2 …
- Google Patents Gyroscope structure Download PDF Info Publication number US11614327B2 …
Accelerometric sensor in mems technology having high accuracy and low sensitivity to temperature and ageing
A Tocchio, F Rizzini, C Valzasina… - US Patent …, 2022 - Google Patents
The accelerometric sensor has a suspended region, mobile with respect to a supporting
structure, and a sensing assem bly coupled to the suspended region and configured to …
structure, and a sensing assem bly coupled to the suspended region and configured to …