J Liu, J Xu, H Cui, X Sun, S Mao, Y Miao… - ECS Journal of Solid …, 2023 - iopscience.iop.org
By employing a 355-nm nanosecond (ns) ultraviolet (UV) laser annealing, the impact of
fluorine (F) co-doping on the formation of a highly activated N-type shallow junction in …