Application of operando spectroscopy on catalytic reactions

Y Zhang, D Fu, X Xu, Y Sheng, J Xu, Y Han - Current Opinion in Chemical …, 2016 - Elsevier
Highlights•Review of the application of operando techniques on catalytic reactions.•The
determination of dynamic structure of catalysts under harsh conditions.•Challenge in …

Diffusion and dopant activation in germanium: Insights from recent experimental and theoretical results

EN Sgourou, Y Panayiotatos, RV Vovk, N Kuganathan… - Applied Sciences, 2019 - mdpi.com
Germanium is an important mainstream material for many nanoelectronic and sensor
applications. The understanding of diffusion at an atomic level is important for fundamental …

Efficient and stable activation by microwave annealing of nanosheet silicon doped with phosphorus above its solubility limit

CH Tsai, CP Savant, MJ Asadi, YM Lin, I Santos… - Applied Physics …, 2022 - pubs.aip.org
The relentless scaling of semiconductor devices pushes the doping level far above the
equilibrium solubility, yet the doped material must be sufficiently stable for subsequent …

[HTML][HTML] Vacancy defects in nitrogen doped diamond

N Kuganathan, A Chroneos, RW Grimes - Physica B: Condensed Matter, 2023 - Elsevier
The introduction of nitrogen-vacancy (N–V) defects in diamond is important as they have
impact on the optical and electronic properties of diamond-based devices. Here, spin …

High Doping Activation (≥1020 cm–3) in Tensile-Strained n-Ge Alloys Achieved by High-Speed Continuous-Wave Laser Annealing

RH Saputro, T Maeda, K Toko… - ACS Applied …, 2024 - ACS Publications
Germanium-based materials are essential for the integration of Group IV optoelectronics in
silicon devices. In addition to tensile strain, high n-type doping is critical, as it provides …

Defect engineering for shallow n‐type junctions in germanium: Facts and fiction

E Simoen, M Schaekers, J Liu, J Luo… - … status solidi (a), 2016 - Wiley Online Library
An overview is given on the status of n‐type dopant activation and diffusion in Ge, based on
a standard ion implantation and annealing scheme. Emphasis is on defect engineering …

Low-hole concentration polycrystalline germanium by CO2 laser annealing for the fabrication of an enhancement-mode nMOSFET

HA Kasirajan, WH Huang, MH Kao… - Applied Physics …, 2018 - iopscience.iop.org
A p-type polycrystalline Ge (poly-Ge) film processed by UV and CO 2 laser annealing
reduces the hole concentration from 6× 10 18 to 2× 10 16 cm− 3, accompanied by poly-grain …

Laser spike annealing for shallow junctions in Ge CMOS

W Hsu, F Wen, X Wang, Y Wang… - … on Electron Devices, 2016 - ieeexplore.ieee.org
An annealing method capable of forming highly activated shallow junctions in Ge CMOS is
still lacking. For the first time, nonmelt submillisecond laser spike annealing (LSA) is …

[HTML][HTML] Nitrogen-vacancy defects in germanium

N Kuganathan, RW Grimes, A Chroneos - AIP Advances, 2022 - pubs.aip.org
While nitrogen doping has been investigated extensively in silicon, there is only limited
information on its interaction with vacancies in germanium, despite most point defect …

Formation of Highly-Activated N-Type Shallow Junction in Germanium Using Nanosecond Laser Annealing and Fluorine Co-Doping

J Liu, J Xu, H Cui, X Sun, S Mao, Y Miao… - ECS Journal of Solid …, 2023 - iopscience.iop.org
By employing a 355-nm nanosecond (ns) ultraviolet (UV) laser annealing, the impact of
fluorine (F) co-doping on the formation of a highly activated N-type shallow junction in …