WCY Ma, CJ Su, KH Kao, YJ Lee, PH Wu… - Semiconductor …, 2023 - iopscience.iop.org
In this work, the ferroelectric thin-film transistor (Fe-TFT) with polycrystalline-silicon (poly-Si)
channel and HfZrO x gate dielectric is fabricated to study the characteristics of non-volatile …