Atomic layer deposition for oxide semiconductor thin film transistors: Advances in research and development
This article is a review of recent research and development advances in oxide thin film
transistors (TFTs) fabricated by atomic layer deposition (ALD) processes. The ALD process …
transistors (TFTs) fabricated by atomic layer deposition (ALD) processes. The ALD process …
[HTML][HTML] Atomic layer deposition of doped ZnO films
Z Gao, P Banerjee - Journal of Vacuum Science & Technology A, 2019 - pubs.aip.org
This article reviews the process-structure-property relationship in doped ZnO thin films via
atomic layer deposition (ALD). ALD is an important manufacturing-scalable, layer-by-layer …
atomic layer deposition (ALD). ALD is an important manufacturing-scalable, layer-by-layer …
Triple-stack ZnO/AlZnO/YZnO heterojunction oxide thin-film transistors by spray pyrolysis for high mobility and excellent stability
We demonstrate a high mobility, triple-stack ZnO/AlZnO/YZnO heterojunction thin-film
transistor (TFT) using the semiconductors deposited by spray pyrolysis at 350° C on an …
transistor (TFT) using the semiconductors deposited by spray pyrolysis at 350° C on an …
Review of Material Properties of Oxide Semiconductor Thin Films Grown by Atomic Layer Deposition for Next-Generation 3D Dynamic Random-Access Memory …
AR Choi, DH Lim, SY Shin, HJ Kang, D Kim… - Chemistry of …, 2024 - ACS Publications
Dynamic random-access memory (DRAM) devices are essential volatile memory
components in most digital devices. With the increasing demand for further low-power and …
components in most digital devices. With the increasing demand for further low-power and …
Recent progress and perspectives on atomic‐layer‐deposited semiconducting oxides for transistor applications
This paper reviews recent developments in the fabrication of high‐performance n‐channel
metal‐oxide thin‐film transistors (TFTs) through atomic‐layer deposition (ALD), which are …
metal‐oxide thin‐film transistors (TFTs) through atomic‐layer deposition (ALD), which are …
[HTML][HTML] Influence of heavy Hf doping in CeO2: prediction on various physical properties
This work employs density functional theory for calculating the structural, mechanical,
anisotropic, thermal, electronic, and optical properties of Ce 1-x Hf x O 2 (x= 0, 0.25, 0.5, and …
anisotropic, thermal, electronic, and optical properties of Ce 1-x Hf x O 2 (x= 0, 0.25, 0.5, and …
Compositional Engineering of Hf‐Doped InZnSnO Films for High‐Performance and Stability Amorphous Oxide Semiconductor Thin Film Transistors
JH Park, HJ Seok, CH Kim, SH Jung… - Advanced Electronic …, 2021 - Wiley Online Library
The Hf‐doped indium zinc tin oxide (Hf: InZnSnO) channel for high performance and stable
transparent thin film transistors (TFTs) is developed by using a simultaneous cosputtering of …
transparent thin film transistors (TFTs) is developed by using a simultaneous cosputtering of …
Analyzing acceptor-like state distribution of solution-Processed indium-zinc-oxide semiconductor depending on the in concentration
Understanding the density of state (DOS) distribution in solution-processed indium-zinc-
oxide (IZO) thin-film transistors (TFTs) is crucial for addressing electrical instability. This …
oxide (IZO) thin-film transistors (TFTs) is crucial for addressing electrical instability. This …
Enhanced Thermoelectric Transport and Stability in Atomic Layer Deposited-HfO2/ZnO and TiO2/ZnO-Sandwiched Multilayer Thin Films
Herein, enhancements in thermoelectric (TE) performance, both the power factor (PF) and
thermal stability, are exhibited by sandwiching HfO2 and TiO2 layers onto atomic layer …
thermal stability, are exhibited by sandwiching HfO2 and TiO2 layers onto atomic layer …
Solution-processed yttrium-doped IZTO semiconductors for high-stability thin film transistor applications
In this article, solution-processed zinc-tin-oxide (ZTO), indium-zinc-tin-oxide (IZTO), and
yttrium-doped indium-zinc-tin-oxide (IZTO: Y) thin film transistors (TFTs) were investigated …
yttrium-doped indium-zinc-tin-oxide (IZTO: Y) thin film transistors (TFTs) were investigated …